Description
The STS M/PLEX AL ETCHER ETCHER is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
Location: Asia
Wafer Size: 6 inch
Condition: Used
MANUFACTURED 2005
Wafer size 6 INCH
Pressure Controller VAT PM-7 65046-PA52-AJAI/0016
Gas Module Chamber 1. CL2 50SCCM
2. HBR 50SCCM
3.Ar 50SCCM
4.CF4 100SCCM
5. O2 50SCCM
6. O2 20SCCM
RF Generator ENI ACG-3B 13.56,
ENI ACG-10B-07
CHILLER AFFINITY RWA-012L-CE35CBD4 STS
TURBO PUMP LEYBOLD MAG 1500CT
DRY PUMP IQDP 80
ID-SS380EB-OEM-9
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