Description
Please contact us for the availability of the following used semiconductor equipment and parts-Lam RESEARCH Lam AutoEtch
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The items are subject to prior sale without notice. These items are only for end users.
| 1 | Lam Research Lam AutoEtch 490 Plasma Etch Plasma Etcher Dry Etch |
| 2 | Lam Research Lam AutoEtch 590 Plasma Etch Plasma Etcher Dry Etch |
| 3 | 713-000038-001 pair of Lexan covers for autoetch loadlock |
| 4 | 734-007762-001 NEW QUAD SEAL FOR LAM AUTOETCH GAP DRIVE |
| 5 | 810-8566-1 PCB Motor Driver, Lam Autoetch, 810-008566-001 |
| 6 | 853-001291-001 rtd interface assy lam autoetch 490 590 |
| 7 | 853-006165-002 EMO rear assy lam autoetch 490 590 |
| 8 | Autoetch 6″ Electrode 715-009777-006 |
| 9 | AUTOETCH MATROX LAM RESEARCH ONTRAK VIDEO CARD #K810-01984-002 REV.A MADE IN USA |
| 10 | Bellows valve, LAM Autoetch, KF-40. NC P/N 900831-1 |
| 11 | Branson/IPC 3100S Plasma System Plasma Asher Plasma descum Dry Asher Dry Clean |
| 12 | Insulation, Iso Valve Body LAM P/N 716-008810-001 |
| 13 | Insulation, Iso Valve Ports LAM P/N 716-008809-001 |
| 14 | Insulation, Manifold Arm long LAM P/N 716-008805-001 |
| 15 | Insulation, Manifold Cross LAM P/N 716-008802-001 |
| 16 | Insulation, Manifold Tail LAM P/N 716-008808-001 |
| 17 | Insulation, Throttle Valve LAM P/N 716-008812-001 |
| 18 | LAM / Advanced Energy 5″ Diffuser 716-006446-001, for LAM 490/590 AutoEtch |
| 19 | LAM AutoEtch 590 Load Lock Harness, Part Number: 853-090305-001 / 853-090305-002 |
| 20 | LAM Autoetch AC-2 Pressure Controller 853-6615-001 |
| 21 | LAM Autoetch Power control/EPO panel assembly |
| 22 | Lam Research P/N: 853-007526-001 / ASSY, OUTER GATE DRIVE CYLINDER / (NEW) |
| 23 | Lam Research P/N: 853-007526-002 / ASSY, INNER GATE DRIVE CYLINDER / (NEW) |
| 24 | Lam Research P/N: 853-009300-001 / ASSY, GAP DRIVE CONTROLLER / REFURBISHED |
| 25 | LAM Research 715-08763-001 |
| 26 | Lam Research AutoEtch 490 / 590 Card RACK, PROLOG STD 7000, MODEL BR16-T |
| 27 | Lam Research AutoEtch 490 / 590 Gas Box / Enclosure |
| 28 | Lam Research AutoEtch 490/590 Combination PCB 810-007930-001 |
| 29 | Lam Research AutoEtch 490/590 PCB 2896A |
| 30 | Lam Research AutoEtch Auto Etch 490 590 853-008100-002-D Loadlock Assembly |
| 31 | Lam Research Autoetch Latch 726-001513-001 |
| 32 | LAM Research Corp. AutoEtch Control Console. |
| 33 | LAM Research Corp. AutoEtch Monitor Assembly 853-000358-001 |
| 34 | Lam Research Electrode Black Anodized 715-008721-001 |
| 35 | Lam Research OnTrak 810-008566-001 PCB MOTOR DRIVER – NEW – LAM AUTOETCH |
| 36 | Lam Research P/N: 676-000504-003 / 12/24 VDC MOTOR FOR AUTOETCH GAP DRIVE SYSTEM |
| 37 | Lam Research P/N: 853-009231-002 / Power Supply +/-5 & 15 VDC AutoEtch |
| 38 | Lam Research P/N: 853-090260-004 / AutoEtch Gap Drive Assembly / Refurbished |
| 39 | LAM RESEARCH RF CABLE NEW 4 METER autoetch / rainbow |
| 40 | Mushroom Wafer lift Air cylinder LAM P/N |
| 41 | NEW LAM RESEARCH P-N 853-007526-002 ASSY INNER GATE DRIVE CYLINDER AUTOETCH 590 |
| 42 | Power Supply, 5VDC@10A for LAM autoetch |
| 43 | Reed Switch for LAM autoetch air cylinders P/N RS-11 |
| 44 | Rod End, wafer transfer, LAM P/N 746-008340-001 |
| 45 | ThermoRack 10-R6AF-3G30-10-S2 |
The items are subject to prior sale without notice. These items are only for end users.
SSEB380