Description
Silicon Wafer with Pocket Carrier
Most customers use a standard silicon wafer carrier with a shallow pocket to hold substrates of various thicknesses. The pocket depth is typically much less than the substrate thickness and is not normally designed to match the full substrate thickness.
Standard silicon wafer carriers are commonly used for wafer handling, lithography, deposition, etch, inspection, process development, and production applications.
When a standard silicon wafer carrier does not meet the application requirements, custom carriers using Si ingot, quartz, ceramic, aluminum, or other materials can be manufactured according to customer drawings.
Various carrier solutions have been supplied for Applied Materials, Lam Research, ASML, TEL, Intel, and other semiconductor equipment companies.
Custom Carrier Design Available
Most applications use a standard silicon wafer carrier. Pocket depth is typically much less than substrate thickness and is not normally designed to match the full substrate thickness.
If a pocket depth equal to or greater than the substrate thickness is required, a custom carrier using Si ingot, quartz, ceramic, aluminum, or other materials may be more suitable.
Standard Silicon Wafer Carrier Specifications
| Material | Pure single crystal silicon |
| Wafer Size | 4 inch, 5 inch, 6 inch, 8 inch, 12 inch, 18 inch, or customized |
| Wafer Thickness | 4″ (100 mm): 525 µm ± 25 µm 5″ (125 mm): 625 µm ± 25 µm 6″ (150 mm): 675 µm ± 25 µm 8″ (200 mm): 725 µm ± 25 µm 12″ (300 mm): 775 µm ± 25 µm |
| Pocket Size & Shape | Customized based on wafer, device, die, coupon, or process carrier requirements |
| Pocket Depth | Typical 200 µm for 4–6 inch wafers; 250 µm for 8–12 inch wafers; other depths available upon request |
| Special Features | Pocket with flat, notch, groove, slot, holes, or special patterns available at extra cost. Minimum hole diameter: 1.5 mm |
| Finish & Flatness | Fine ground finish; flatness typically ±0.001 inch |
| Lead Time | Stock samples may be available for immediate shipment. Standard silicon wafer carriers typically require 2–4 weeks. Fully custom carriers depend on material, design complexity, and quantity. |
Purchase or Order Paths
Standard Carrier Samples
View Standard Silicon Wafer and Carrier Samples
- Many standard carrier configurations may be available from stock
- Reference part number
- Quantity
- Immediate shipment, subject to availability
- No minimum order quantity for available stock items
Standard Silicon Wafer Carrier
- Standard silicon wafer carrier with custom pocket size, pattern, or dimensions
- Wafer size
- Pocket size and key dimensions
- Quantity
- Typical lead time: 2–4 weeks
- Minimum order quantity: 5 pieces
- Standard manufacturing tolerances apply
Fully Custom Carrier
- Suitable when a standard silicon wafer carrier is not appropriate
- Drawing with dimensions and tolerances
- Material
- Quantity
- Typical materials include Si ingot, quartz, ceramic, aluminum, and other special materials
- Lead time depends on material, design complexity, and quantity
- Minimum order quantity: 5 pieces
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