Main Maker

VACUTEC – RIE / PECVD System, 6″

VACUTEC – RIE / PECVD System, 6″

Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450,Perkin-Elmer 4480, Perkin-Elmer 2400, Perkin Elmer 4400, Perkin Elmer 4410, Perkin Elmer 4450,Perkin Elmer 4480, Perkin Elmer 2400, Sputter, Magnetron Sputter, Diode Sputter, DC Sputter, RF Sputter, DC Magnetron Sputter, RF Magnetron Sputter, Co-sputter, Reactive Sputter, MRC, MRC 603, MRC 903, MRC 602, MRC 902, MRC 604, MRC 904, MRC 924, Plasma Etch, Dry Clean, Bias Function, Cathode, Load lock, Degas, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment,, Thin Film, Metal Thin Film, Thin Film Deposition, PVD, Physical Vapor Deposition

Category:

Description

VACUTEC – RIE / PECVD System, 6″

Used for 3 x 3″ wafers
Dual chamber:
PECVD: SiN Deposition
RIE: SiN Etch

Pumps:
LEYBOLD Turbo backup pumps:
One with rotary and roots blower
One with rotary and turbo

Gas lines PECVD: SiH4, Ar, N2, NH3, SF6
Gas lines RIE: Ar, O2, CF4, SF6
RF Generator: ENI ACG5 500W
Matching unit: DRESSLER
Sofie cam: Endpoint detection
Tubing pumps.

Please contact us for more information on the product:

Your Name*:

Your Email:

Your Message:

Captchac Codecaptcha

Submit:

SS380CAESS5487

You may also like…

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers