Description
ULVAC PHOENIX 200MM ASHER / STRIPPER
OPERATIONAL WHEN REMOVED FROM SERVICE
INCLUDES BROOKS ENTRANCE AND TRANSFER LOAD LOCKS.
RIE (RF) and/or DOWNSTREAM OPERATION (MICROWAVE)
EXCELLENT FOR REMOVAL OF HIGH DOSE IMPLANT or POST VIA ETCH
6 Mass Flow Controllers, PUMPS NOT INCLUDED
SS361904088318