Main Maker

ULVAC PHOENIX

Category:

Description

ULVAC PHOENIX 200MM ASHER / STRIPPER

OPERATIONAL WHEN REMOVED FROM SERVICE

INCLUDES BROOKS ENTRANCE AND TRANSFER LOAD LOCKS.

RIE (RF) and/or DOWNSTREAM OPERATION (MICROWAVE)

EXCELLENT FOR REMOVAL OF HIGH DOSE IMPLANT or POST VIA ETCH

6 Mass Flow Controllers, PUMPS NOT INCLUDED

Please contact us for more information on the product:

Your Name*:

Your Email:

Your Message:

Captchac Codecaptcha

Submit:

SS361904088318

 

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers