Tegal Parts

Description

Please contact us if you are interested in the Tegal parts. Appreciate your time. These are  only for end user. They are subject to prior sale without notice. First come, first serviced.

1. 901E Monthly PM O-ring kit, Tegal P/N
2. 99-173-008 /RFG-8 GENERATOR BOARD / TEGAL
3. ADM-3 POWER MONITOR PCB FOR TEGAL 9XXe SYSTEMS PN: 99-209-003
4. ADM-3 POWER MONITOR PCB FOR TEGAL 9XXe SYSTEMS PN: 99-209-003
5. Applied Ceramics 40-588-003B Insulator Outer Tegal 95-00054A
6. Applied Ceramics 40-588-003B Insulator Outer Tegal 95-00054A
7. Applied Ceramics 40-753-004-3 Disc Top Oblated Stripper Tegal New Su
8. Applied Ceramics 40-753-004-3 Disc Top Oblated Stripper Tegal New Surplus
9. ATI-3 AUTOTUNE PCB FOR TEGAL 1500e/1600 SYSTEMS PN: 99-196-003 J
10. Bearing TEGAL 80-200-121 flanged SS DOOR
11. Bearing TEGAL 80-200-121 flanged SS DOOR T915
12. BELT GROMMET FOR SHUTTLE TEGAL 901 903
13. BELTS FOR SENDER RECEIVER TEGAL 901 903
14. BURKS 81-007-145 SEAL PUMP TEGAL SEAL 1/2 TEPOLITE TGL-1013 PHANTOM
15. Carrier ring 4 inch, Tegal P/N
16. CAT 99-142-001 PCB ADIS-1 TEGAL 915
17. CLIPPARD EVO-3M 24VDC 10 SOLENOID VALVE ASSEMBLY, TEGAL PN: 31-147-008
18. CLIPPARD EVO-3M 24VDC 10 SOLENOID VALVE ASSEMBLY, TEGAL PN: 31-147-008
19. Collabrx Tegal CD1043-00205 Industrial Main Controller Control Module/pl
20. Collabrx Tegal CD1043-00205 Industrial Main Controller Control Module/plug-in
21. CollabRx/Tegal CD1043-00601 Industrial Main Controller Control Module/Plug-In
22. COLOSSLOTH CD Troum MZ412 Merzbow Schloss Tegal Coil Sutcliffe Jugend Whitehouse
23. Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E
24. Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E
25. Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E
26. Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E
27. Curved indexer block, Tegal P/N 8100-1091
28. DEP-2 DUAL DIODE ENDPOINT PCB FOR TEGAL 9XXe/ACS SYSTEMS PN: 99-249-003
29. DEP-2 DUAL DIODE ENDPOINT PCB FOR TEGAL 9XXe/ACS SYSTEMS PN: 99-249-003 REV B
30. Djocja Tegal Indonesia City Gate Postal Used Antique Postcard J59081
31. DUTCH EAST INDIES – 1894 – MiNr. P15 IIIa “TEGAL” SQUARED CIRCLE DATE STAMP
32. Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 Used Wo
33. Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 Used Working
34. Edwards W185-08-001 Mechanical Vacuum Throttle Valve 1850 ISO200 Tegal 6500
35. Edwards W185-08-001 Mechanical Vacuum Throttle Valve 1850 ISO200 Tegal 6500 Used
36. Endpoint cable, Fiber Optic, Tegal P/N 80-207-159
37. EPROM Firmware Load/Unload, Tegal P/N 26-003-001
38. GCA Tegal (66635-14) Circulating System (-15C-to +85C)
39. Integrated Circuit Support ICS-40-297-002 Quartz Pin, Tegal 40-297-002, 410475
40. INTEGRATED CIRCUIT SUPPORT ICS-40-395-001 Castellated Ceramic Fot 903 TEGAL
41. ISEL ROBOTIK ATMOSPHERIC ELEVATOR 10-27-0037/0038 TEGAL 80-055-717
42. Laser BARR 2202 TEGAL 80-506-003 endpoint filter 520/10nm CWL / FWHM, 25
43. Laser BARR 2202 TEGAL 80-506-003 endpoint filter 520/10nm CWL / FWHM, 25mm Di
44. Manifold weldment, 3 line with ultratorr fitting, Tegal P/N 33-091-001
45. Manifold weldment, 4 line with ultratorr fitting, Tegal P/N
46. March Plasmod RF Amp board, Plasma etcher, plasma asher, plasma system
47. March/tegal Plasmod 100
48. MBE-4 PCB FOR TEGAL 9XXe CONTROLLERS PN: 99-207-004
49. MBE-4 PCB FOR TEGAL 9XXe CONTROLLERS PN: 99-207-004
50. MOTOR, Belt drive Barber Coleman, Tegal P/N
51. NOS – (2) IN STOCK – TEGAL 901 BELT(S) – Long & Short – 2 come in each package
52. NOS – (4) IN STOCK – TEGAL BELT DRIVE(S) #30-101-001 B
53. NWT Sandal Born Tegal Brown Suede Womens size 10M Beach Ankle
54. NWT Sandal Born Tegal Brown Suede Womens size 10M Beach Ankle Strap
55. OEM Part TEGAL 39-34-005 Chamber body
56. OEM Part TEGAL 39-34-005 Chamber body 903E
57. OEM Part TEGAL 39-341-005 CHAMBER
58. OEM Part TEGAL 39-341-005 CHAMBER BODY
59. OEM Part TEGAL 40-297-110C TEGAL 40-297-110C Pin Ceramic 901
60. PCB, Process Control, Tegal P/N 99-019-02
61. PCB, Sensor with cables, Tegal P/N 99-089-001
62. PCB, TEGAL Main, Tegal P/N 99-114-001, 99-117-001
63. PCB, Tegal P/N 99-095-001
64. Photocell, Tegal P/N 80-500-007
65. Profacture PRO-80-679-012 Switch Opt SLTD IC=1800UA, Tegal 80-679-012
66. PROFACTURE TEGAL ICG-6 Gas Interface Board
67. Qualidyne 234AA0A-0172 Power Supply 23092EFG Tegal VME-PS400-01 Used Working
68. QUARTZ LIFT PINS TEGAL 903ACS, 903e 40-297-002 Rev E 5 PIN LOTS
69. QUARTZ LIFT PINS TEGAL 903ACS, 903e 40-297-002 Rev E LOT of 4 PINS
70. Relay Magnecraft W389ADZCX-3 TEGAL 80-650-053 30A 24V
71. Semi Parts SPI- 80- 200-342, Band Connector, Tegal 80-200-342,
72. Semi Parts SPI-99-247-003ALT Spatula Inerface SPI-3, Tegal 99-247-003
73. Semi-Parts SPI-99-224-001 Center Sensor, CSN-1, PCB, Tegal 99-224-001
74. Sensor, Cybeq, Siltec, Tegal P/N 0121-6260-100
75. Sensor, E4 Ring Present, Tegal P/N
76. Sensor, temperature, Tegal P/N
77. Shaft, Tegal P/N 50-007-001
78. SMC / Tegal 98-008-01 Rev-B PCB Assy ULUSP-98008-01
79. SPI-3 SPATULA INT PCB FOR TEGAL 90Xe SYSTEMS PN: 99-247-
80. SPI-3 SPATULA INT PCB FOR TEGAL 90Xe SYSTEMS PN: 99-247-003 J
81. Surinam 1901 PPC to Tegal + Suriname Via Plymouth
82. Switch, Tegal P/N 80-678-004
83. Switch, Tegal P/N 80-678-014
84. Tegal , RF Match
85. Tegal , RF Match
86. TEGAL / CollabRx Part # 99-185-002 Control Module Board
87. Tegal 00755601 Temperature Display Board, PCB
88. Tegal 00755601 Temperature Display Board, PCB,
89. Tegal 045-048 Temperature Probe Assembly for 903e
90. Tegal 1512e Industrial RIE Plasma Etcher System w/Modules Assembly
91. Tegal 1512e Industrial RIE Plasma Etcher System w/Modules Assembly
92. Tegal 1512e Industrial RIE Plasma Etcher System w/Modules Assembly
93. Tegal 1512e Industrial RIE Plasma Etcher System w/Modules Assembly
94. Tegal 200-61 Automation Board #1
95. Tegal 200-61 Automation Board #1
96. Tegal 211 Plasma Asher Used
97. TEGAL 211 PLASMA-ASHER
98. Tegal 211 Plasmaline Industrial Semiconductor Etcher Asher Chamber Unit PARTS
99. TEGAL 26-003-001B-LMC-U7 / 26003001BLMCU7 (RQAUS1)
100. TEGAL 26-003-001-LMC-U7 / 26003001LMCU7 (RQAUS1)
101. Tegal 30-251-001 RF Conn Assy – Lot
102. Tegal 30-251-001 RF Conn Assy – Lot of 4
103. Tegal 3152140-00B PEP 250-T Industrial Z-Match Antenna Tuner M
104. Tegal 3152140-00B PEP 250-T Industrial Z-Match Antenna Tuner Module
105. Tegal 33-527-001 Bellow Chuck New Su
106. Tegal 33-527-001 Bellow Chuck New Surplus
107. Tegal 37-231-602 Chuck Ring Used Wo
108. Tegal 37-231-602 Chuck Ring Used Working
109. Tegal 37-423-001 Rev.4 Industrial Lab Metal Disk w/ Dual Protruding Modules
110. Tegal 37-441-004 Cooling Flange 6500 HRe Dual Frequency Etch System Used Working
111. Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e
112. Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum
113. Tegal 39-767-002 Insulator Coupling
114. Tegal 39-767-002 Insulator Coupling,
115. Tegal 39-767-002 Insulator Coupling,
116. Tegal 40-046-001 Quartz Window Rev. D
117. Tegal 40-140-003D, Ring, Insultator, Ceramic
118. Tegal 40-140-003D, Ring, Insultator, Ceramic,
119. Tegal 40-297-001 Quartz Pin – Lot of 13
120. TEGAL 40-395-003B CERAMIC RETAINING RI
121. TEGAL 40-395-003B CERAMIC RETAINING RING 4″
122. Tegal 40-606-004 Ceramic Liner
123. Tegal 40-606-004 Ceramic Liner HRE2
124. Tegal 41-137-001, Chuck, BTTM Flag 903
125. Tegal 41-137-001, Chuck, BTTM Flag 903,
126. TEGAL 41-215-001 GASKET GROUND RING RETAINER FOR USE WITH SOLID GROUND
127. Tegal 41-238-008 RF Shield React
128. Tegal 41-238-008 RF Shield React Fill
129. TEGAL 415 PLASMA ASHER
130. Tegal 415 Plasma Asher, Plasmaline, 415:7,
131. Tegal 42-841-001 Rev.B Industrial Upper Chamber Assembly 39-700-007 Rev.A PARTS
132. Tegal 46-952-002 Stripper Gas Panel UFC-1100A As-Is
133. TEGAL 50-013-001 SCREW LEAD ELEVATOR FOR TEGAL 901/903 8.5″ L 1/2″ DIAMETER
134. TEGAL 50566-02 AUX RF Controller Control Module Board 83-12
135. TEGAL 50566-02 AUX RF Controller Control Module Board 83-126-003
136. Tegal 50566-02-ISS3 AUX/RF Controller Control Module/Board/Card 83-126-003
137. TEGAL 50590 01
138. TEGAL 515 PLASMA ASHER (With Warranty)
139. TEGAL 515 PLASMALINE PLASMA ASHER
140. Tegal 55-005-001 Drive Loader Belt
141. Tegal 55-005-001 Drive Loader Belt 3
142. TEGAL 58-027-001
143. Tegal 59-011-001, Linkage Top PL Latch
144. Tegal 59-011-001, Linkage Top PL Latch
145. TEGAL 80-055-104 Metric Strip Chart Paper
146. TEGAL 80-055-104 Metric Strip Chart Paper
147. Tegal 80-095-278RW Rev. A DACSCAN PCB (Re-Worked)
148. TEGAL 80-200-121 DOUBLE SHIELD BEARING F
149. TEGAL 80-200-121 DOUBLE SHIELD BEARING FLANGE
150. TEGAL 80-200-144 BALL BUSHING BEARING 3/8″ BORE 5/8″ OD
151. Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole
152. Tegal 80-202-186, Timing Belt
153. Tegal 80-202-186, Timing Belt,
154. Tegal 80-202-189, O-R Viton 7, 1/4ID 1/8W, D70
155. Tegal 80-202-190, O-R Viton 10, 1/2ID 3/16W, D70
156. Tegal 803 Inline Automatic Plasma Etcher
157. Tegal 80-500-002 Photocell 250V 55K – Lot of 2
158. Tegal 80-871-146, Cable, RF, W/N Connectors, 410525
159. Tegal 81-007-138 Bellow Plug for Plasma Etcher 900 S
160. Tegal 81-007-138 Bellow Plug for Plasma Etcher 900 Series
161. Tegal 81-105-223 Heater 120V 60Hz – Lot
162. Tegal 81-105-223 Heater 120V 60Hz – Lot of 2
163. Tegal 900 Circuit boards Lot
164. Tegal 900 series upper Chamber, complete
165. Tegal 900E Cassette to Cassette Photoresist Strip/Backside Etching
166. Tegal 901 PCB ENDPOINT DETECTOR 99-181-006 REV A EPD-6 WAFER Semicond
167. Tegal 901 PCB ENDPOINT DETECTOR 99-181-006 REV A EPD-6 WAFER Semiconductor
168. Tegal 901e Plasma Etcher
169. Tegal 901e Plasma Etcher 901e Plasma Etcher #1 with ENI ACG-10 RF Power Supply
170. Tegal 903 Showerhead Profacture Pro-37-221-002 Electrode Upper 903E, 408766
171. Tegal 903 Showerhead Tech Star Industries TSI-TG221-002, Electrode Upper, 408768
172. TEGAL 903ACS/903e ANODIZED UPPER ELECTRODE, NEW PN: 37-221-001
173. TEGAL 903ACS/903e ANODIZED UPPER ELECTRODE, NEW PN: 37-221-001 REV H
174. Tegal 903E CW 1078-40203 Send/Receive Sender/Receiver Spatula Drive/D
175. Tegal 903E CW 1078-40203 Send/Receive Sender/Receiver Spatula Drive/Driver
176. Tegal 903e IGC-5 PCB for Plasma Etcher 99-126-005
177. Tegal 903e Operations and Maintenance Manual for Plasma Production Etcher
178. Tegal 903e Pin for Plasma Etcher (40-297-002)
179. Tegal 903e Plasma ETCHER lamps 12v 0.8w, Set of 4, 80-640-018 new
180. Tegal 903E Plasma ETCHER MATCH NETWORK CABLE, 80-871-146, NOS
181. Tegal 903E PLASMA ETCHER PCB, 50590-01
182. Tegal 903e Plasma ETCHER Quartz Pins, Set of 6, 40-297-002
183. Tegal 903e Sensor Interface Spatula SIS-5 99-200-005 M3
184. Tegal 903e Sensor Interface Spatula SIS-5 99-200-005 M300353
185. Tegal 903e Tempurature Monitor Control Board TMC-4 99-138-004 M2
186. Tegal 903e Tempurature Monitor Control Board TMC-4 99-138-004 M297350
187. Tegal 903E UPPER ELECTRODE, P/N 37-221-002, NOS
188. Tegal 93-137-009, RF Cable
189. Tegal 93-137-009, RF Cable,
190. Tegal 94-400-001, Harness Sensor
191. Tegal 94-400-001, Harness Sensor,
192. Tegal 94-484-001 Cable Assy
193. Tegal 94-484-001 Cable Assy,
194. TEGAL 98-04-001 / 9804001 (RQAUS1)
195. Tegal 98-244-001 Rev. A (original TEGAL board)
196. Tegal 98-354-002 CPU Transition Board VME PCB Card Used Wo
197. Tegal 98-354-002 CPU Transition Board VME PCB Card Used Working
198. Tegal 98-363-00 VME Backplane Board PCB CTC-ML Used Wo
199. Tegal 98-363-00 VME Backplane Board PCB CTC-ML Used Working
200. TEGAL 99-028-001 / 99028001 (RQAUS1)
201. TEGAL 99-043-002 / 99043002 (RQAUS1)
202. TEGAL 99-045-001-AUT1 / 99045001AUT1 (RQAUS1)
203. TEGAL 99-046-001 / 99046001 (RQAUS1)
204. TEGAL 99-046-602 / 99046602 (RQAUS1)
205. TEGAL 99-049-003 / 99049003 (RQAUS1)
206. TEGAL 99-050-002-PRC-2 / 99050002PRC2 (RQAUS1)
207. TEGAL 99-050-008 / 99050008 (RQAUS1)
208. Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB
209. TEGAL 99-081-001 Gas control interface, GCS-1 PCB assy, used PCB board
210. TEGAL 99-081-001 Gas control interface, GCS-1 PCB board assy
211. TEGAL 99-082-003 gas control logic, GCL-3 PCB board assy
212. Tegal 99-089-001 Sensor and Cables for 903 or 915 Etcher/Asher
213. TEGAL 99-092-001 / 99092001 (RQAUS1)
214. Tegal 99-096-09 DIP Board Rev. G Used Wo
215. Tegal 99-096-09 DIP Board Rev. G Used Working
216. Tegal 99-099-001 PCB
217. TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001
218. TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001
219. Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001,
220. Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001,
221. TEGAL 99-112-001 Top display control, TDC-1 PCB board assy
222. Tegal 99-126-005 IGC-5 Gas Control PCB Rev. N
223. Tegal 99-126-005 IGC-5 PCB Rev. J for 901E and 903E
224. Tegal 99-126-006 Interface Board PCB ICG-6
225. Tegal 99-126-006 Interface Board PCB ICG-6 Untested
226. Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005
227. Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005
228. Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006
229. Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006
230. Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006,
231. Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006,
232. Tegal 99-138-001 PCB Assembly, FAB 98-138-001
233. Tegal 99-160-006 Industrial/Laboratory Controller Board Ass
234. Tegal 99-160-006 Industrial/Laboratory Controller Board Assembly
235. Tegal 99-173-003 RFG-3 PCB – Lot of 2
236. Tegal 99-173-004 PCB, RFG-4, RF Gen Interface
237. Tegal 99-173-004 PCB, RFG-4, RF Gen Interface,
238. TEGAL 99-173-004 REV D RFG-4 RFG4 GENERATOR BOARD
239. Tegal 99-173-008 PCB, RFG-8, RF Gen Interface
240. Tegal 99-173-008 PCB, RFG-8, RF Gen Interface
241. Tegal 99-173-04 PCM I/O RF GEN for 903 or 915 Etcher/Asher
242. Tegal 99-174-008 REV-F BLP-8 Industrial PCB Printed Circuit Board Card Unit
243. Tegal 99-186-001 Rev. 2A Interface Board Att-1 Used Wo
244. Tegal 99-186-001 Rev. 2A Interface Board Att-1 Used Working
245. Tegal 99-187-002 ATO-2 Interface Board PCB Rev. B Used Working
246. Tegal 99-196-002 ATI-2 PCB Rev. F
247. Tegal 99-196-002 ATI-2 PCB Rev. W
248. Tegal 99-196-002 RW ATI-2 PCB Rev. P
249. Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002
250. Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002
251. TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE
252. TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE.
253. Tegal 99-207-004/K MBE-4 PCB
254. Tegal 99-223-002 PCB, DSN-2, Dual Sensor
255. Tegal 99-223-002 PCB, DSN-2, Dual Sensor
256. Tegal 99-223-002 PCB, DSN-2, Dual Sensor
257. Tegal 99-223-002 PCB, DSN-2, Dual Sensor
258. Tegal 99-223-002 PCB, DSN-2, Dual Sensor
259. Tegal 99-223-002 PCB, DSN-2, Dual Sensor
260. Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001
261. Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001
262. Tegal 99-237-002 Interface Board PCB EEP-2 Untested AS-IS
263. Tegal 99-247-002 Rev. M SPI-2 PCB
264. Tegal 99-247-003 Interface Board PCB SPI-3 Rev. D
265. Tegal 99-247-003 Interface Board PCB SPI-3 Rev. J
266. TEGAL 99-247-003 REV D BOARD PCB
267. Tegal 99-287-001D REV C SST PCB
268. Tegal 99-287-003 /B SST-3 PCB
269. Tegal 99-287-003RW SST-3 Shuttle Interface STDT/9XXE PCB
270. Tegal 99-339-001 PMC CPU Transition Board Plug-In Module Ass
271. Tegal 99-339-001 PMC CPU Transition Board Plug-In Module Assembly
272. Tegal 99-340-001/A PMC Serial Transition Board Plug-In Module Assembly
273. Tegal 99-341-001 Industrial/Laboratory Console Interface Board PCB Ass
274. Tegal 99-341-001 Industrial/Laboratory Console Interface Board PCB Assembly
275. Tegal 99-343-001/A Industrial/Laboratory Master Control Console Board Assembly
276. Tegal 99-360-001 Processor Board VME PCB Card AOB-1 98-360-001 Used Wo
277. Tegal 99-360-001 Processor Board VME PCB Card AOB-1 98-360-001 Used Working
278. Tegal 99-385-001 DC/DC Converter Board PCB Rev. 4 6500 HRe Dual Frequency Used
279. Tegal 99-385-001 DC/DC Converter Board PCB Rev. A 6500 HRe Dual Frequency Used
280. Tegal 99-385-008 DC/DC Converter Board PCB Rev. E 6500 HRe Dual Frequency Used
281. TEGAL 99-80184-02 vacuum sensor PCB board
282. TEGAL 99-80184-02 vacuum sensor PCB board assy
283. Tegal 9XX DAC-SCAN PCB p/n 80-095-278
284. TEGAL 9XX DAC-SCAN PCB Part # 80-095-278 revA Original Tegal Board w/ 99-207-004
285. TEGAL 9XX DAC-SCAN PCB Part # 99-184-001 Rev. 8 MIC-1
286. Tegal 9XX PCB TMC-4 TEMP MONITOR CONTROL, P/N 99-138-004, NOS
287. Tegal 9XX PCB, 99-165-003 REV.J
288. Tegal 9XX PCB, 99-165-003 REV.J, NOS
289. Tegal 9XX PCB, 99-207-003 REV.2
290. Tegal 9XX PCB, 99-207-003 REV.2 MBE-3
291. Tegal 9XX PCB, 99-207-004 REV.C
292. Tegal 9XX PCB, 99-207-004 REV.C MBE-4
293. Tegal 9XX PLASMA ETCHER PCB IMN-3 RF MATCH INTERFACE, 99-172-003, 98-17
294. Tegal 9XX PLASMA ETCHER PCB IMN-3 RF MATCH INTERFACE, 99-172-003, 98-172-003
295. Tegal 9XX PLASMA ETCHER PCB SIS-5 SENSOR INTERFACE P/N 99-200-005
296. Tegal 9XX PLASMA ETCHER PCB SIS-5 SENSOR INTERFACE P/N 99-200-005 REV B
297. Tegal 9XX Plasma ETCHER RF GASKET, 41-39
298. Tegal 9XX Plasma ETCHER RF GASKET, 41-399-001
299. Tegal 9XX PLASMA ETCHER SOLENOID VALVE ASSY SND/RCV 31-173-001
300. Tegal 9XX Plasma Etcher STEPPER MOTOR RF MATCH, SPI-31-217-002-A, VEXTA PH2
301. Tegal 9XX Plasma Etcher STEPPER MOTOR RF MATCH, SPI-31-217-002-A, VEXTA PH266L33
302. Tegal 9XX SEND RECEIVE PCB, P/N 99-247-003 REV.E, NOS
303. Tegal 9XX SEND RECEIVE SPATULA DRIVE. CW1078-50401, 150MM, LOT
304. Tegal 9XX SEND RECEIVE SPATULA DRIVE. CW1078-50401, 150MM, LOT OF 2
305. Tegal Aloon-Aloon Mosque Java Indonesia 20s
306. Tegal CC1326-00100 Chamber-Stripper For Parts
307. Tegal CC1326-00100 Chamber-Stripper For Parts As-Is
308. Tegal CC1327-00300 EZ Reactor Assembly HRE-PM1 6500 HRe Used Wo
309. Tegal CC1327-00300 EZ Reactor Assembly HRE-PM1 6500 HRe Used Working
310. Tegal CD-1039-00106RW Endpoint Detector w/ Cards 99-208-003 + 83-126-003
311. Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In
312. Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In #2
313. Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Ass
314. Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Assembly
315. Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Ass
316. Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Assembly
317. Tegal CE1029-00201 Industrial/Laboratory DC Power Module Plug-In Unit
318. Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In
319. Tegal CE1093-00303 Industrial Motor Controller Module Plug-In
320. Tegal CE1093-00303 Industrial Motor Controller Module Plug-In Unit
321. Tegal CE1153-00102 Passivation Module w/Watlow 804 Temperature Contr
322. Tegal CE1153-00102 Passivation Module w/Watlow 804 Temperature Controller
323. Tegal CE1153-00102RW Passivation Module w/Watlow 804 Temperature Contr
324. Tegal CE1153-00102RW Passivation Module w/Watlow 804 Temperature Controller
325. Tegal CE1323-10101 AC Distribution Unit 6500 HRe Dual Frequency Plasma Etch Used
326. Tegal CG1041-00401 Industrial Pressure Controller w/Vacuum General AG-2 Ada
327. Tegal CG1041-00401 Industrial Pressure Controller w/Vacuum General AG-2 AdapTorr
328. Tegal CG1041-00402RW Pressure Controller w/Vacuum General AG-2 AdapTorr
329. Tegal CG1150-00205RN Industrial 8-Channel RWK Gas Controller Plug-In Module Unit
330. Tegal Coat of Arms Java Indonesia ca 1925
331. TEGAL CollabRx Indexer Module CW1048
332. Tegal Cooling Ring for Drie 3200
333. Tegal Cooling Ring for Drie 3200 Tools
334. Tegal Corp 39-452-002A ARM UPPER LH DOOR T915
335. Tegal Corp 39-453-001 TEGAL ARM LOWER RH DOOR
336. Tegal Corp 39-453-002 TEGAL LOWER LH DOOR T915
337. Tegal Corp 39-958-001 TEGAL PULLEY TENSION DOOR T915
338. Tegal Corp 40-275-001 UPPER INSULATOR
339. Tegal Corp 42-401-001 Bracket Slide Rear LH T915
340. Tegal Corp 42-401-002 O-Ring, 235 V
341. Tegal Corp 42-402-001 Bracket Slide Front LH T915
342. Tegal Corp 42-402-002 Bracket Slide Front RH T915
343. Tegal Corp 57-017-001 TEGAL PULLEY IDLER (BIG) DOOR T915
344. Tegal Corp 80-095-146 Transformer 220/115-24V AC Module T9156-P-1623420
345. Tegal Corp 80-200-219 “SLIM-TRACK” BARNES ENG. CO.; SLIDE CHAMBER T915
346. Tegal Corp 81-007-145 SEAL PUMP; TEGAL SEAL 1/2 TEPOLITE (80-095-397)
347. Tegal Corp 81-007-146 SEAL RING PUMP
348. Tegal Corp 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER
349. Tegal Corp 99-196-003RW PCB ATI-3 AUTO TUNE T915
350. Tegal Corp 99-203-004 PCB MNP-4 MTCH NTWK
351. Tegal Corp 99-206-001 PCB AGCP-1 TEGAL 915
352. Tegal Corp Inline Automatic Wafer RF Plasma Etcher Untested As Is 803
353. Tegal Corp. Plasma Inline Etcher As Is for Parts 701
354. Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module
355. Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module Unit
356. Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module
357. Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module Unit
358. Tegal CR1040-00205EX Industrial RF Controller Plug-In Module
359. Tegal CR1040-00205EX Industrial RF Controller Plug-In Module Unit
360. Tegal CR1087-20101RW RWK-RF Generator CR1087-20101RW – RF Plasma Model# T-502S
361. Tegal CR1324-00100 RF Match Network Source Strip Untested
362. Tegal CR1324-00100 RF Match Network Source Strip Untested As-Is
363. Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe Used Wo
364. Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe Used Working
365. Tegal CW1033-00301 Industrial Wafer Elevator Assembly w/Stepping Motor
366. Tegal CW1033-00302 Industrial Wafer Elevator Assembly w/Stepping Motor
367. Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping
368. Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor
369. Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly
370. Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit
371. Tegal CW1048-00502RW Industrial Pneumatic RWK Indexer Module Assembly Unit
372. Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board
373. Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board,
374. Tegal DACSCAN PCB Battery New 3.6 Volts TL-5135
375. TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201
376. Tegal elevator frame assembly
377. Tegal Endeavor AT PVD tool – SNAP IO SMC Controller for Process Module
378. TEGAL EPROM 400k MEMORY PCB, PN 99-09
379. TEGAL EPROM 400k MEMORY PCB, PN 99-095-320
380. Tegal FLIP 03601-22-040 Alphanumeric Fluorescent Display
381. TEGAL Front Robot Loader interface
382. Tegal Gas Contrller 99-092-004 NEW
383. Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack
384. Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack #2
385. Tegal Industrial Heated Upper Electrode Chamber Assembly Unit 39-700-007
386. Tegal Industrial Lab Plasma Etcher Upper Body Chamber Ring w/Viewing Port #2
387. Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit
388. Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS
389. Tegal Industrial Lab Upper Body Chamber Ring w/Viewing Side Ports 39-662-002
390. Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5″ Diameter
391. Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5″ Diameter
392. Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 6.75″ Diameter
393. Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230-00100
394. Tegal Inline Automatic Wafer RF Plasma Etcher As Is for Parts or Repair 803
395. TEGAL INTERFACE BOARD 99-173-003
396. Tegal Latch Top PL RH 52-058-002 NEW
397. Tegal Model 421 Manual PCB 99-011-001
398. Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot
399. Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot
400. Tegal Model 421, 4″, 100 mm Aluminum Wafer Carrier, 25 Slot
401. Tegal Model 421, 4″, 100 mm Aluminum Wafer Carrier, 25 Slot
402. Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-03
403. Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS
404. Tegal Model 903e Plasma Etcher DC POWER DISTRIBUTION PCB, 99-142-001
405. Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008
406. Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS
407. Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99-126-005 REV M
408. Tegal Model 903e Plasma Etcher Power Distribution Gas Interface PCB 99-142-001
409. Tegal Model 903e Plasma Etcher PRESSURE SENSOR ATM, PRO 31-375-001
410. Tegal Model 903e Plasma Etcher PRESSURE SENSOR ATM, PRO 31-375-001, NOS
411. Tegal Model 903e Plasma Etcher UPPER CHAMBER GROUND, PRO 29-464-001
412. Tegal Model 903e Plasma Etcher UPPER CHAMBER GROUND, PRO 29-464-001, NOS
413. tegal nordson march plasma system super plasmod plasma etcher vacuum AMAT
414. Tegal Old Wood Buffet Table Lamp by Uttermost #29201-1
415. Tegal P/N 31-165-006 Stepping Motor, Carrier
416. Tegal Part # 39-767-003 Rev.A Coupling,Insulator 9XX
417. Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE
418. Tegal PC Board 50566-02, p/n 83-126-003
419. TEGAL PLASMA 903e Plasma Etcher with ENI ACG-10B RF Generator
420. TEGAL PLASMA ETCH, ELECTRODE, LOWER 39-735-002 REV.M
421. TEGAL PLASMA ETCHER 9XX 98-247-002, TSI.
422. TEGAL PLASMA ETCHER 9XX 98-247-002, TSI. REV B
423. TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006
424. TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006 REV F
425. TEGAL PLASMA ETCHER 9XX SHUTTLE INTERFACE PCB, 98-287-002
426. TEGAL PLASMA ETCHER 9XX SHUTTLE INTERFACE PCB, 98-287-002 REV A
427. TEGAL PLASMA ETCHER 9XX SHUTTLE INTERFACE PCB, 99-287-003, SST-3,
428. TEGAL PLASMA ETCHER 9XX SHUTTLE INTERFACE PCB, 99-287-003, SST-3, REV B
429. Tegal Plasma Etcher System
430. TEGAL PLASMALINE 200 ASHER
431. Tegal Plasmaline 411 Asher Plasma Oven AR O2 Etcher
432. Tegal Plasmaline Barrel Etch Plasma System
433. TEGAL PLASMALINE MODEL 421 PLASMA ETCHER / ASHER
434. TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS
435. Tegal Post Telegraph Telephone Office Java Indonesia ca 1899
436. Tegal Power Distribution Box – Hoffman Enclosure – 208 Volts 3 Phase
437. Tegal Power Distribution PSU Power Supply w/Hoffman Type I Box Enclosure PARTS
438. Tegal Quartz PIN P/N 40-297-001
439. Tegal Quartz PIN P/N 40-297-001-E, NEW, 2 each
440. Tegal Railway Station S.C.S. Java Indonesia 20s
441. Tegal Railway Station Train Java Indonesia stamp 1910
442. TEGAL RF SIGNAL GENENRATOR SUPPLY T-
443. TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E
444. Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400
445. Tegal SPI-80-095-057 Probe Temperature SST
446. Tegal SPI-99-247-003 SPI-3, Tegal 99-247-003,
447. Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Ass
448. Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Assembly
449. Tegal Top PL Latch LH 52-058-002 Left Side NEW IN PACKAGE
450. TEGAL TOP PLATE LATCH L.H. 52-057-002 NEW IN PACKAGE PROFACTURE
451. Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102
452. Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 3
453. Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002,
454. Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea.
455. Tegal, PC Board – IGC-6, Gas Interface, p/n 99-126-006,
456. Tegal, PC Board – IGC-6, Gas Interface, p/n 99-126-006, Rev C
457. TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98-287-002 REV. A DVO 450-B
458. TEGAL: 50566-02 AUX RF Controller Control Module Board 83-12
459. TEGAL: 50566-02 AUX RF Controller Control Module Board 83-126-003
460. Thermo Couple (TC) TEGAL 80-700-xx JES-CE
461. Unit/Tegal CHF3 80SCCM — UFC-1000 — Used
462. Vacuum valve, KF-40. Tegal P/N
463. Valve CLIPPARD EVO-3M-24 TEGAL 80-198-054 VALVE PNEU PPT 3WAY NO
464. Valve CLIPPARD EVO-3M-24 TEGAL 80-198-054 VALVE PNEU PPT 3WAY NO 24VDC
465. VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe Used Wo
466. VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe Used Working
467. VCE CONTROLLER VCC-8 PCB FOR TEGAL 6500 SYSTEMS PN: 99-38
468. VCE CONTROLLER VCC-8 PCB FOR TEGAL 6500 SYSTEMS PN: 99-385-008

SS380