Description
SPTS / STS Versalis FxP :
- Wafer Size: 8″
- 3 Chambers: PECVD, ICP etch, Rapier DSE
- Delta PECVD deposition chamber: Currently used for a-Si and Oxide deposition
- ICP etch chamber with interferometric and end point system
- Rapier deep silicon chamber
Condition: Used. We sell it at AS IS .
Valid : It is only for end users and is subject to prior sale without notice. Appreciate your time!
Info on the system from the owner for your reference.
OEM-Cluster-2