Description
KLA-Tencor Spare Parts
OEM, Refurbished & Reverse-Engineered Replacement Parts
SemiStar supplies spare parts for legacy KLA-Tencor metrology equipment to help customers extend equipment life, reduce downtime, and lower maintenance costs.
Whether you need an OEM replacement, a refurbished assembly, or a reverse-engineered solution for an obsolete component, our experienced engineering team can help.
Contact us today for pricing, availability, or technical assistance.
Spare Parts Inventory
Our current inventory includes:
- Field Illumination Shutter (FISO) Assemblies Part Number 52-0420
- H2 Handler End Effectors : Part Number 52-0375
- UV Cutoff Filter Assemblies: Part Number 52-0412
- Neutral Density (ND) Filter Assembly: Part Number 52-0286
- Focus Flipper (Focus Aperture Pneumatic Actuator): Part Number 52-0316
- SE Flipper Assemblies – KLA F5X only: Part Number: 52-0916
- Vacuum Connector Assemblies
- Electrical Connector Assemblies
Additional inventory is continually being added.
Reverse Engineering Services
Many legacy KLA-Tencor spare parts are no longer available from the OEM.
We specialize in reverse engineering obsolete mechanical assemblies and replacement components to help keep your equipment operating.
Typical turnaround time for mechanical replacement parts is 1–2 weeks after receiving a reference sample.
We also evaluate PCB assemblies and other discontinued components on a case-by-case basis.
Engineering Evaluation & Equipment Refurbishment
SemiStar provides comprehensive Engineering Evaluation, repair, refurbishment, calibration, and performance optimization services for legacy KLA-Tencor metrology systems.
Typical Engineering Evaluation services include:
- Complete system inspection
- Mechanical, electrical, optical, and PCB diagnostics
- Calibration assessment
- Performance verification
- Engineering Evaluation Report with recommended refurbishment scope
- Repair and refurbishment
- Performance optimization
- Final acceptance testing
- Optional onsite installation, startup, calibration, and operator training after refurbishment
Engineering Evaluation is performed at our facility before the refurbishment scope is finalized. Following customer approval, SemiStar performs the refurbishment, calibration, performance optimization, and final acceptance testing. Onsite installation, startup, calibration, and operator training are available after refurbishment. Please provide the information at the link , which will help us evaluate your equipment and prepare the most appropriate Engineering Evaluation proposal.
Supported Equipment
KLA-Tencor
- Tencor Mgage 200
- Tencor Mgage 300
- Tencor Sonogage 200
- RS-35C
- RS-55
- RS-75
- RS-100
- UV-1050
- UV-1080
- UV-1250
- UV-1280
- ASET F5 / F5X
- AIT Systems
- HRP-220 Stylus Profiler
Why Choose SemiStar?
- OEM, refurbished, and reverse-engineered replacement parts
- Cost-effective alternative to discontinued OEM components
- Fast response and worldwide support
- Technical assistance from experienced metrology engineers
- Support for legacy semiconductor metrology systems
- Depot-level engineering evaluation and refurbishment for legacy KLA metrology systems
Need a Part Not Listed?
If you cannot find the part you need, please contact us.
Our engineering team can identify replacement parts, evaluate obsolete components, and develop reverse-engineered solutions for many legacy KLA-Tencor systems.
We are not affiliated with or endorsed by KLA Corporation. The part numbers and equipment models are referenced solely for compatibility identification purposes.