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Edwards QDP80 + QMB500

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SKU: Edwards QDP80 + QMB500 Category:

Description

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Model: Edwards QDP80 +QMB500

Quantity: 1

Condition: Good condition. We did not test it. We sell it at As-Is Where IS condition.

Related Equipment: Plasma Asher PLasma Etch equipment

Description of BOC Edwards QDP80 Dry Semiconductor  Vacuum Pump with QMB-500 for reference only:

These Edwards QDP80 QDP 80 Dry Vacuum Pump QMB500 QMB 500 Dry Booster Blower “Dry Pumps” are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.

The pump specifications are as follows:

Supply Voltage
3 Phase 208/460 VAC

Warm-Up Time
15 min

Inlet Connection

ISO 63

Outlet Connection
NW40

Peak Speed
96 m3h-1
56.5 ft3min-1

Displacement
110 m3h-1
64.7 ft3min-1

Ultimate Vacuum
1 x 10-2 mbar
8 x 10-3 Torr

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