Agilent

• STS Multiplex DRIE
• STS Multiplex ICP 
• STS MESC Multiplex ICP
• Multiplex ICP MACS
• STS multi-chamber Cluster
• STS Mutiplex ICP
• Matrix 302
• Matrix 303 
• Tegal 903e Plasma Etch
• Tegal 903e Plasma Etch
• Tegal 903e Plasma Etch
• Lam AutoEtch 590
• Lam Auto Etch 590
• Lam Rainbow 4728
• Plasma Therm 700
• Plasmatherm SLR 720
• Plasmatherm 790
• Branson/IPC 4150
• Branson/IPC 3000

Vacuum Pump

• Edwards QDP80 + QMB500
• Ebara A10S Dry Pump 
• Edwards IQDP40 Dry Pump

• • Plasma Therm 700
  • AMAT AMP-3300
  • CHA /FC-1800 Evaporation 
  • CVC Products AST-601
  • Airco Temescal FC-1800 
  • Temescal FC-1800 
  • Temescal FC-1800  
  • Airco Temescal FC-1800
  • MRC 603 Sputter
  • MRC 643 Sputter
  • MRC 643
  • Perkin-Elmer 4400
  • Perkin-Elmer 4400
  • Plasmalab CVD-2 

Chillers

• Fisher Scientific Chiller
• PolyScience 9102A Chiller 
• PolyScience 9105 Chiller 
• FTS System MAXI COOL
• NESLAB SYSTEM II
• Neslab CFT-25 Recirculator
• Thermo MERLIN Series m150
• NESLAB CFT-75
• NESLAB CFT-33
• NESLAB SYSTEM I
• NESLAB SYSTEM II
• Neslab RTE-110 Chiller 
• Thermo Fisher Scientific Chiller 
• Thermo Fisher  Neslab 7
• ThermoRack 10-R6AF-3G30-10
• Temptronic TP03500

• • Branson IPC 3000
  • Matrix 105
  • Matrix 205
  • Matrix Bobcat 209S
  • Matrix Bobcat 209S 
  • Gasonics L3510 
  • Gasonics L3500
  • Gasonics Aura 2000LL
  • Matrix System One Stripper

Machining Ceramic Wafer Carrier

• Si wafer carriers
• Si Ingot carriers /Parts
• SiC wafer carriers/Parts
• Al2O3 Precision Ceramic
• AlN Precision Ceramic
• Si3N4 Precision Ceramic
• B4C Precision Ceramic
• BN Precision Ceramic
• ZrO2 Precision Ceramic

• Heatpulse 8800
• Heatpulse 8108
• Heatpulse 4108
• Heatpulse 4100 
• Heatpulse 610
• Mini-Pulse 310
• Heatpulse 610  
• Heatpulse 210
• RTP-3000

Metrology Tester Prober

• EG 1034
• EG4085
• Olympus MX50A-F with Al100-L6
• Nanometrics 210 Nanospec AFT 
• HP 4062 and Testers
• Hitachi FE-SEM S-5000

Spare Parts in stock