Description
STS MULTIPLEX ASE ICP
- STS Multiplex ASE ICP Etcher
- Vintage: 2000
- ENI 300/30 Watts, 13.56 MHz
- RF Power supply: 3 kW, 13.56 MHz RF Upper electrode power supply
- 6″ Manual load lock Cassette to cassette loader
- He backside cooling, 6″ Clamp
- LEYBOLD Mag 2000CT Turbo pump
- LEYBOLD Mag Drive controller
- OnBoard gas panel: 4 MFCs
- MAC Power: 208 V, 60 Hz, 3 Phase, 50 A
Please contact us if you are interested in the STS MULTIPLEX ASE ICP. We do not own the items. These items are only for end user. They are subject to prior sales without notice. First come, first serviced. Appreciate your time.
