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Upgrade -Gasonics


Upgrade kits for  your used  Gasonics  plasma asher descum etcher equipment.

  • PC controller
  • Touch screen monitor
  • Repair or replace bad parts if necessary at extra cost.
  • Installation is available at extra cost depending on the location of the equipment.
  • Other replacement parts are available at extra costs.
  • Lead time: 8-20 weeks depending on PO time. We will do our best to expedite your PO if necessary without extra charge.
  • Models: Gasonics Aura 1000 ; Gasonics Aura 3000; Gasonics Aura 3010; Gasonics Aura 2000-LL; Gasonics AE 2001; Gasonics AE 2000LL etc.
  • Please contact us for final purchase RFQ with an official quotation accordingly.
  • Please contact us if you have any questions.
Why upgrade your old used semiconductor process equipment ?
  1. Low cost solution of obsolete components and parts.
  2. New modules for obsolete modules in the original used equipment if applicable, such as RF Generator, Integrated solid robotic wafer transfer, PCBs.
  3. Requirement of stability of the system
  4. Requirement of network function (GEM/SECSII).
  5. Requirement of PC control for data storage.
  6. Requirement of GUI.
  7. Requirement of more precise control.
  8. Requirement of better repeatability, uniformity.
  9. Requirement of easier maintenance, calibration, and trouble shooting.

Plasma Asher, Plasma Descum, Dry Clean, Downstream Asher,Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Gasonics Aura 1000, Gasonics Aura 2000, Gasonics Aura 3000, Gasonics L3510, Gasonics Aura 3010, Plasma Etcher, Plasma Etching, Dry Etching, Dry Clean,Gasonics AE 2001, Gasonics AE 2000LL

Additional information

Weight 15 lbs
Dimensions 24 × 24 × 12 in

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers