Description
Tegal Spare Parts. These are only for END USERS. Please contact us for the availability of the following Tegal parts. Subject to prior sale. Appreciate your time!
| 1 | TEGA-ETC-CP-CR1008-00407 | Matching Network Assy 915 |
| 2 | TEGA-ETC-CP-CR1008-00407RP | Matching Network Assy 915 |
| 3 | TEGA-ETC-CP-CR1008-00407RP | Matching Network Assy 915 |
| 4 | TEGA-ETC-CP-CR1008-00407RP | Matching Network Assy 915 |
| 5 | TEGA-ETC-CP-CR1008-00407RP | Matching Network Assy 915 |
| 6 | TEGA-ETC-CP-CR1113-00301 | Matching Network Assy 901/03 |
| 7 | TEGA-ETC-CP-CR1113-00301RP | Matching Network Assy 901/03 |
| 8 | TEGA-ETC-CP-CR1113-00301RP | Matching Network Assy 901/03 |
| 9 | TEGA-ETC-CP-CR1113-00301RP | Matching Network Assy 901/03 |
| 10 | TEGA-ETC-CP-CR1113-00301RP | Matching Network Assy 901/03 |
| 11 | TEGA-ETC-CP-CR1113-00301RP | Matching Network Assy 901/03 |
| 12 | TEGA-ETC-CP-CR1113-00301RP | Matching Network Assy 901/03 |
| 13 | TEGA-ETC-CP-CR1113-00301RP | Matching Network Assy 901/03 |
| 14 | TEGA-ETC-CP-CR1113-00301RP | Matching Network Assy 901/03 |
| 15 | TEGA-ETC-CP-CR1113-00301RP | Matching Network Assy 901/03 |
| 16 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 17 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 18 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 19 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 20 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 21 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 22 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 23 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 24 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 25 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 26 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 27 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 28 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 29 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 30 | TEGA-ETC-CW-31-388-001 | Rf Cable (901) |
| 31 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 32 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 33 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 34 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 35 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 36 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 37 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 38 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 39 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 40 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 41 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 42 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 43 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 44 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 45 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 46 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 47 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 48 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 49 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 50 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 51 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 52 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 53 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 54 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 55 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 56 | TEGA-ETC-CW-31-530-005 | Rf Cable(915) |
| 57 | TEGA-ETC-MC-31-193-003 | Sv For Chuck Up/Down |
| 58 | TEGA-ETC-MC-33-350-001 | Chamber Gas Shaft |
| 59 | TEGA-ETC-MC-33-350-001 | Chamber Gas Shaft |
| 60 | TEGA-ETC-MC-33-350-001 | Chamber Gas Shaft |
| 61 | TEGA-ETC-MC-33-350-001 | Chamber Gas Shaft |
| 62 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 63 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 64 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 65 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 66 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 67 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 68 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 69 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 70 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 71 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 72 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 73 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 74 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 75 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 76 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 77 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 78 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 79 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 80 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 81 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 82 | TEGA-ETC-MC-37-221-042 | Shower Head 903 |
| 83 | TEGA-ETC-MC-39-627-002 | Chuck Plate 901 |
| 84 | TEGA-ETC-MC-39-627-002 | Chuck Plate 901 |
| 85 | TEGA-ETC-MC-39-627-002 | Chuck Plate 901 |
| 86 | TEGA-ETC-MC-39-627-002 | Chuck Plate 901 |
| 87 | TEGA-ETC-MC-39-627-002 | Chuck Plate 901 |
| 88 | TEGA-ETC-MC-39-627-002 | Chuck Plate 901 |
| 89 | TEGA-ETC-MC-39-627-003 | Chuck Plate (Poly Process) |
| 90 | TEGA-ETC-MC-39-627-003 | Chuck Plate (Poly Process) |
| 91 | TEGA-ETC-MC-39-627-003 | Chuck Plate (Poly Process) |
| 92 | TEGA-ETC-MC-39-627-003 | Chuck Plate (Poly Process) |
| 93 | TEGA-ETC-MC-39-627-003 | Chuck Plate (Poly Process) |
| 94 | TEGA-ETC-MC-39-627-003 | Chuck Plate (Poly Process) |
| 95 | TEGA-ETC-MC-39-732-001 | Tegal Collar Pin |
| 96 | TEGA-ETC-MC-39-732-001 | Tegal Collar Pin |
| 97 | TEGA-ETC-MC-39-732-001 | Tegal Collar Pin |
| 98 | TEGA-ETC-MC-39-732-001 | Tegal Collar Pin |
| 99 | TEGA-ETC-MC-39-732-001 | Tegal Collar Pin |
| 100 | TEGA-ETC-MC-39-732-001 | Tegal Collar Pin |
| 101 | TEGA-ETC-MC-39-741-009 | Chuck Lower Electrode 903 |
| 102 | TEGA-ETC-MC-39-741-009 | Chuck Lower Electrode 903 |
| 103 | TEGA-ETC-MC-39-741-009 | Chuck Lower Electrode 903 |
| 104 | TEGA-ETC-MC-40-159-001 | Saphire Rod |
| 105 | TEGA-ETC-MC-40-159-001 | Saphire Rod |
| 106 | TEGA-ETC-MC-40-159-001 | Saphire Rod |
| 107 | TEGA-ETC-MC-40-159-001 | Saphire Rod |
| 108 | TEGA-ETC-MC-40-159-001 | Saphire Rod |
| 109 | TEGA-ETC-MC-40-159-001 | Saphire Rod |
| 110 | TEGA-ETC-MC-40-159-001 | Saphire Rod |
| 111 | TEGA-ETC-MC-40-159-008 | Saphire O-Ring |
| 112 | TEGA-ETC-MC-40-159-008 | Saphire O-Ring |
| 113 | TEGA-ETC-MC-40-159-008 | Saphire O-Ring |
| 114 | TEGA-ETC-MC-40-159-008 | Saphire O-Ring |
| 115 | TEGA-ETC-MC-40-159-008 | Saphire O-Ring |
| 116 | TEGA-ETC-MC-40-159-008 | Saphire O-Ring |
| 117 | TEGA-ETC-MC-40-159-008 | Saphire O-Ring |
| 118 | TEGA-ETC-MC-40-159-008 | Saphire O-Ring |
| 119 | TEGA-ETC-MC-40-297-001 | Chuckpin 901(Short) |
| 120 | TEGA-ETC-MC-40-297-001 | Chuckpin 901(Short) |
| 121 | TEGA-ETC-MC-40-297-001 | Chuckpin 901(Short) |
| 122 | TEGA-ETC-MC-40-297-001 | Chuckpin 901(Short) |
| 123 | TEGA-ETC-MC-40-297-001 | Chuckpin 901(Short) |
| 124 | TEGA-ETC-MC-40-297-001 | Chuckpin 901(Short) |
| 125 | TEGA-ETC-MC-40-297-001 | Chuckpin 901(Short) |
| 126 | TEGA-ETC-MC-40-297-001 | Chuckpin 901(Short) |
| 127 | TEGA-ETC-MC-40-297-002 | Chuckpin 903(Long) |
| 128 | TEGA-ETC-MC-40-297-002 | Chuckpin 903(Long) |
| 129 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 130 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 131 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 132 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 133 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 134 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 135 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 136 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 137 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 138 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 139 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 140 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 141 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 142 | TEGA-ETC-MC-55-004-001 | Belt Drive Carriage |
| 143 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 144 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 145 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 146 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 147 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 148 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 149 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 150 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 151 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 152 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 153 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 154 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 155 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 156 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 157 | TEGA-ETC-MC-55-005-001 | Belt Drive Loader |
| 158 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 159 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 160 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 161 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 162 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 163 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 164 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 165 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 166 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 167 | TEGA-ETC-MC-55-008-001 | Clear Spactual Belt(Sender/Reciever) |
| 168 | TEGA-ETC-MC-57-027-001 | Bearing (Roller) |
| 169 | TEGA-ETC-MC-57-027-001 | Bearing (Roller) |
| 170 | TEGA-ETC-MC-57-028-001 | Bearing(Roller) |
| 171 | TEGA-ETC-MC-57-028-001 | Bearing(Roller) |
| 172 | TEGA-ETC-MC-80-080-062 | Top Cover Guide |
| 173 | TEGA-ETC-MC-80-080-062 | Top Cover Guide |
| 174 | TEGA-ETC-MC-80-080-062 | Top Cover Guide |
| 175 | TEGA-ETC-MC-80-080-085 | Cylinder Chuck Pin Stopper |
| 176 | TEGA-ETC-MC-80-127-063 | Chamber Screw (10/32 X 1/2) |
| 177 | TEGA-ETC-MC-80-127-063 | Chamber Screw (10/32 X 1/2) |
| 178 | TEGA-ETC-MC-80-127-063 | Chamber Screw (10/32 X 1/2) |
| 179 | TEGA-ETC-MC-80-127-063 | Chamber Screw (10/32 X 1/2) |
| 180 | TEGA-ETC-MC-80-127-142 | Chuck Screw (8/32 X 3/8) |
| 181 | TEGA-ETC-MC-80-127-262 | Chuck Screw (10/32 X 3/8) |
| 182 | TEGA-ETC-MC-80-127-273 | Chuck Screw (10/32 X 1 1/4) |
| 183 | TEGA-ETC-MC-80-127-362 | Chuck Screw, Patchlok, (10/32 X 3/8) |
| 184 | TEGA-ETC-MC-80-127-363 | Chuck Screw (10/32 X 1/2) |
| 185 | TEGA-ETC-MC-80-128-143 | Chamber Screw |
| 186 | TEGA-ETC-MC-80-128-143 | Chamber Screw |
| 187 | TEGA-ETC-MC-80-128-143 | Chamber Screw |
| 188 | TEGA-ETC-MC-80-150-151 | Chamber Screw (10/24 X 1/8) |
| 189 | TEGA-ETC-MC-80-150-151 | Chamber Screw (10/24 X 1/8) |
| 190 | TEGA-ETC-MC-80-150-151 | Chamber Screw (10/24 X 1/8) |
| 191 | TEGA-ETC-MC-80-150-152 | Chamber Screw |
| 192 | TEGA-ETC-MC-80-150-152 | Chamber Screw |
| 193 | TEGA-ETC-MC-80-150-152 | Chamber Screw |
| 194 | TEGA-ETC-MC-80-150-286 | Shower Head Screw (8/32 X 3/4) |
| 195 | TEGA-ETC-MC-80-170-002 | Stand Off Ceramic |
| 196 | TEGA-ETC-MC-80-170-002 | Stand Off Ceramic |
| 197 | TEGA-ETC-MC-80-170-002 | Stand Off Ceramic |
| 198 | TEGA-ETC-MC-80-170-002 | Stand Off Ceramic |
| 199 | TEGA-ETC-MC-80-170-013 | Stand Off Ceramic |
| 200 | TEGA-ETC-MC-80-170-013 | Stand Off Ceramic |
| 201 | TEGA-ETC-MC-80-170-013 | Stand Off Ceramic |
| 202 | TEGA-ETC-MC-80-170-013 | Stand Off Ceramic |
| 203 | TEGA-ETC-MC-80-192-200 | Fitting Chuck |
| 204 | TEGA-ETC-MC-80-192-200 | Fitting Chuck |
| 205 | TEGA-ETC-MC-80-192-200 | Fitting Chuck |
| 206 | TEGA-ETC-MC-80-200-121 | Dbl Shielded Flanged Bearing(Big) |
| 207 | TEGA-ETC-MC-80-200-121 | Dbl Shielded Flanged Bearing(Big) |
| 208 | TEGA-ETC-MC-80-200-121 | Dbl Shielded Flanged Bearing(Big) |
| 209 | TEGA-ETC-MC-80-200-121 | Dbl Shielded Flanged Bearing(Big) |
| 210 | TEGA-ETC-MC-80-200-127 | Flanged Bearing |
| 211 | TEGA-ETC-MC-80-200-127 | Flanged Bearing |
| 212 | TEGA-ETC-MC-80-200-127 | Flanged Bearing |
| 213 | TEGA-ETC-MC-80-200-127 | Flanged Bearing |
| 214 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 215 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 216 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 217 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 218 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 219 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 220 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 221 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 222 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 223 | TEGA-ETC-MC-80-200-144 | Ball Bushing Bearing |
| 224 | TEGA-ETC-MC-80-200-342 | Chuck Pin Spring |
| 225 | TEGA-ETC-MC-80-200-342 | Chuck Pin Spring |
| 226 | TEGA-ETC-MC-80-200-342 | Chuck Pin Spring |
| 227 | TEGA-ETC-MC-80-200-342 | Chuck Pin Spring |
| 228 | TEGA-ETC-MC-80-200-342 | Chuck Pin Spring |
| 229 | TEGA-ETC-MC-80-200-342 | Chuck Pin Spring |
| 230 | TEGA-ETC-MC-80-200-342 | Chuck Pin Spring |
| 231 | TEGA-ETC-MC-80-200-366 | Clamper Chiller Tube |
| 232 | TEGA-ETC-MC-80-200-366 | Clamper Chiller Tube |
| 233 | TEGA-ETC-MC-80-200-366 | Clamper Chiller Tube |
| 234 | TEGA-ETC-MC-80-200-366 | Clamper Chiller Tube |
| 235 | TEGA-ETC-MC-80-200-366 | Clamper Chiller Tube |
| 236 | TEGA-ETC-MC-80-200-366 | Clamper Chiller Tube |
| 237 | TEGA-ETC-MC-80-200-366 | Clamper Chiller Tube |
| 238 | TEGA-ETC-MC-80-200-366 | Clamper Chiller Tube |
| 239 | TEGA-ETC-MC-80-200-366 | Clamper Chiller Tube |
| 240 | TEGA-ETC-MC-80-202-034 | Shaft Groment |
| 241 | TEGA-ETC-MC-80-202-083 | O Ring Silic Gray 915 (Front Window) |
| 242 | TEGA-ETC-MC-80-202-083 | O Ring Silic Gray 915 (Front Window) |
| 243 | TEGA-ETC-MC-80-202-083 | O Ring Silic Gray 915 (Front Window) |
| 244 | TEGA-ETC-MC-80-202-083 | O Ring Silic Gray 915 (Front Window) |
| 245 | TEGA-ETC-MC-80-202-187 | O Ring Silic Gray 915 (Reactor Medium ) |
| 246 | TEGA-ETC-MC-80-202-187 | O Ring Silic Gray 915 (Reactor Medium ) |
| 247 | TEGA-ETC-MC-80-202-187 | O Ring Silic Gray 915 (Reactor Medium ) |
| 248 | TEGA-ETC-MC-80-202-189 | Tegal 901 Shower Head O Ring |
| 249 | TEGA-ETC-MC-80-202-189 | Tegal 901 Shower Head O Ring |
| 250 | TEGA-ETC-MC-80-202-189 | Tegal 901 Shower Head O Ring |
| 251 | TEGA-ETC-MC-80-202-189 | Tegal 901 Shower Head O Ring |
| 252 | TEGA-ETC-MC-80-202-190 | Chamber Viton O Ring |
| 253 | TEGA-ETC-MC-80-202-190 | Chamber Viton O Ring |
| 254 | TEGA-ETC-MC-80-202-190 | Chamber Viton O Ring |
| 255 | TEGA-ETC-MC-80-202-190 | Chamber Viton O Ring |
| 256 | TEGA-ETC-MC-80-202-190 | Chamber Viton O Ring |
| 257 | TEGA-ETC-MC-80-202-190 | Chamber Viton O Ring |
| 258 | TEGA-ETC-MC-80-202-191 | O-Ring Viton(Chuck Small) |
| 259 | TEGA-ETC-MC-80-202-191 | O-Ring Viton(Chuck Small) |
| 260 | TEGA-ETC-MC-80-202-191 | O-Ring Viton(Chuck Small) |
| 261 | TEGA-ETC-MC-80-202-191 | O-Ring Viton(Chuck Small) |
| 262 | TEGA-ETC-MC-80-202-192 | O-Ring Viton Chuck |
| 263 | TEGA-ETC-MC-80-202-192 | O-Ring Viton Chuck |
| 264 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 265 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 266 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 267 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 268 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 269 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 270 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 271 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 272 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 273 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 274 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 275 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 276 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 277 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 278 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 279 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 280 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 281 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 282 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 283 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 284 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 285 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 286 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 287 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 288 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 289 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 290 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 291 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 292 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 293 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 294 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 295 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 296 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 297 | TEGA-ETC-MC-80-202-228 | Tegal 915 Door O Ring |
| 298 | TEGA-ETC-MC-80-202-326 | O Ring 915 ( Reactor Small ) |
| 299 | TEGA-ETC-MC-80-202-326 | O Ring 915 ( Reactor Small ) |
| 300 | TEGA-ETC-MC-80-202-326 | O Ring 915 ( Reactor Small ) |
| 301 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 302 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 303 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 304 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 305 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 306 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 307 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 308 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 309 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 310 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 311 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 312 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 313 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 314 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 315 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 316 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 317 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 318 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 319 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 320 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 321 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 322 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 323 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 324 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 325 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 326 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 327 | TEGA-ETC-MC-80-202-357 | Chuck O-Ring |
| 328 | TEGA-ETC-MC-80-202-396 | Isolation Valve O-Ring (Med) |
| 329 | TEGA-ETC-MC-80-202-396 | Isolation Valve O-Ring (Med) |
| 330 | TEGA-ETC-MC-80-202-396 | Isolation Valve O-Ring (Med) |
| 331 | TEGA-ETC-MC-80-202-396 | Isolation Valve O-Ring (Med) |
| 332 | TEGA-ETC-MC-80-202-396 | Isolation Valve O-Ring (Med) |
| 333 | TEGA-ETC-MC-80-202-396 | Isolation Valve O-Ring (Med) |
| 334 | TEGA-ETC-MC-80-202-396 | Isolation Valve O-Ring (Med) |
| 335 | TEGA-ETC-MC-80-202-396 | Isolation Valve O-Ring (Med) |
| 336 | TEGA-ETC-MC-80-202-397 | Isolation Valve O-Ring (Smll) |
| 337 | TEGA-ETC-MC-80-202-397 | Isolation Valve O-Ring (Smll) |
| 338 | TEGA-ETC-MC-80-202-397 | Isolation Valve O-Ring (Smll) |
| 339 | TEGA-ETC-MC-80-202-397 | Isolation Valve O-Ring (Smll) |
| 340 | TEGA-ETC-MC-80-202-397 | Isolation Valve O-Ring (Smll) |
| 341 | TEGA-ETC-MC-80-202-397 | Isolation Valve O-Ring (Smll) |
| 342 | TEGA-ETC-MC-80-202-397 | Isolation Valve O-Ring (Smll) |
| 343 | TEGA-ETC-MC-80-202-397 | Isolation Valve O-Ring (Smll) |
| 344 | TEGA-ETC-MC-80-202-397 | Isolation Valve O-Ring (Smll) |
| 345 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 346 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 347 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 348 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 349 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 350 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 351 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 352 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 353 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 354 | TEGA-ETC-MC-80-202-405 | Isolation Valve O-Ring (Big) |
| 355 | TEGA-ETC-MC-81-007-077 | Isolation Valve Kit / Vacc. Valve Kit |
| 356 | TEGA-ETC-MC-81-007-077 | Isolation Valve Kit / Vacc. Valve Kit |
| 357 | TEGA-ETC-MC-81-007-077 | Isolation Valve Kit / Vacc. Valve Kit |
| 358 | TEGA-ETC-MC-81-007-077 | Isolation Valve Kit / Vacc. Valve Kit |
| 359 | TEGA-ETC-MC-83-237-001 | Chamber Screw (10/32 X 1/2) |
| 360 | TEGA-ETC-MC-83-237-001 | Chamber Screw (10/32 X 1/2) |
| 361 | TEGA-ETC-MC-83-237-001 | Chamber Screw (10/32 X 1/2) |
| 362 | TEGA-ETC-MC-SS-BN4-K1 | Bn Series Bellows Valve Stainless Steel |
| 363 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 364 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 365 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 366 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 367 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 368 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 369 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 370 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 371 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 372 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 373 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 374 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 375 | TEGA-ETC-MC-ST-T-0001 | Pm Kit, Send/Recv, 90x |
| 376 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 377 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 378 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 379 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 380 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 381 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 382 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 383 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 384 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 385 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 386 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 387 | TEGA-ETC-MC-ST-T-0002 | Pm Kit, Shuttle, 90x |
| 388 | TEGA-ETC-MC-ST-T-0003 | Lower Electrode Pm Kit 901e |
| 389 | TEGA-ETC-MC-ST-T-0003 | Lower Electrode Pm Kit 901e |
| 390 | TEGA-ETC-MC-ST-T-0003 | Lower Electrode Pm Kit 901e |
| 391 | TEGA-ETC-MC-ST-T-0003 | Lower Electrode Pm Kit 901e |
| 392 | TEGA-ETC-MC-ST-T-0003 | Lower Electrode Pm Kit 901e |
| 393 | TEGA-ETC-MC-ST-T-0003 | Lower Electrode Pm Kit 901e |
| 394 | TEGA-ETC-MC-ST-T-0003 | Lower Electrode Pm Kit 901e |
| 395 | TEGA-ETC-MC-ST-T-0004 | Lower Electrode Pm Kit 9013e |
| 396 | TEGA-ETC-MC-ST-T-0004 | Lower Electrode Pm Kit 9013e |
| 397 | TEGA-ETC-MC-ST-T-0004 | Lower Electrode Pm Kit 9013e |
| 398 | TEGA-ETC-MC-ST-T-0004 | Lower Electrode Pm Kit 9013e |
| 399 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 400 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 401 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 402 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 403 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 404 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 405 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 406 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 407 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 408 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 409 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 410 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 411 | TEGA-ETC-MC-ST-T-0005 | 901e Chamber Pm Kit |
| 412 | TEGA-ETC-MC-ST-T-0007 | 903 Chamber Pm Kit (Non-Direct Cooled) |
| 413 | TEGA-ETC-MC-ST-T-0007 | 903 Chamber Pm Kit (Non-Direct Cooled) |
| 414 | TEGA-ETC-MC-ST-T-0007 | 903 Chamber Pm Kit (Non-Direct Cooled) |
| 415 | TEGA-ETC-MC-ST-T-0007 | 903 Chamber Pm Kit (Non-Direct Cooled) |
| 416 | TEGA-ETC-OE-93-117-006 | Rf Cable For Rfg To Match Network |
| 417 | TEGA-ETC-OE-99-176-001 | Pcb Sensor 1 , Shuttle |
| 418 | TEGA-ETC-OE-99-246-003 | Elevator Interface Pcb |
| 419 | TEGA-ETC-PH-6LV-BNBW4-C | Bn Series Bellows Valve Stainless Steel (1/4″ Bellow Valve, Normally Closed Ss316) |
| 420 | TEGA-ETC-PH-6LV-BNBW4-C | Bn Series Bellows Valve Stainless Steel (1/4″ Bellow Valve, Normally Closed Ss316) |
| 421 | TEGA-ETC-PH-SS-4BK-TW-1C | B Series Bellows Valve Stainless Steel (Bk Bellow Vlv 1/4″Tsw X, 3/8″Bw N/Closed Ss316) |
| 422 | TEGA-ETC-PS-ACG10-B | Eni Rf Generator 1000w |
| 423 | TEGA-ETC-PS-ACG10-B | Eni Rf Generator 1000w |
| 424 | TEGA-ETC-PS-ACG10-B | Eni Rf Generator 1000w |
| 425 | TEGA-ETC-PS-CE-1004-00901 | Ac Power Supply Refurbished |
| 426 | TEGA-ETC-PS-CE-1004-00901 | Ac Power Supply Refurbished |
| 427 | TEGA-ETC-PS-CE-1005-00202 | Dc Power Supply Refurbished |
| 428 | TEGA-ETC-SC-80-095-278AW-RP | Dac Scan Board (Repair) |
| 429 | TEGA-ETC-SC-80-095-278AW-RP | Dac Scan Board (Repair) |
| 430 | TEGA-ETC-SC-99-126-006 | Gas Interface |
| 431 | TEGA-ETC-SC-99-126-006RP | Gas Interface |
| 432 | TEGA-ETC-SC-99-138-004RP | Temp. Board Repair |
| 433 | TEGA-ETC-SC-99-173-008 | Rfg Board |
| 434 | TEGA-ETC-SC-99-173-008 | Rfg Board |
| 435 | TEGA-ETC-SC-99-247-00X3 | Sender / Recv. Board |
| 436 | TEGA-ETC-SC-99-287-001 | Shutter Board |
| 437 | TEGA-ETC-SC-99-287-001 | Shutter Board |
| 438 | TEGA-ETC-SC-99-287-001RP | Shuttle Board |
| 439 | TEGA-ETC-SC-99-287-001RP | Shuttle Board |
| 440 | TEGA-ETC-SC-99-287-001RP | Shuttle Board |
| 441 | TEGA-ETC-SC-99-287-001RP | Shuttle Board |
| 442 | TEGA-ETC-SC-99-287-001RP | Shuttle Board |
| 443 | TEGA-ETC-SE-80-095-057 | Tc Probe |
| 444 | TEGA-ETC-SE-80-095-057 | Tc Probe |
| 445 | TEGA-ETC-SE-80-095-057 | Tc Probe |
| 446 | TEGA-ETC-SE-94-228-006 | Harness Cassette Sensor |
| 447 | TEGA-ETC-SE-99-223-002 | Dual Sensor Dsn-2 |
| 448 | TEGA-ETC-SE-99-223-002 | Dual Sensor Dsn-2 |
| 449 | TEGA-ETC-SE-99-223-002 | Dual Sensor Dsn-2 |
| 450 | TEGA-ETC-TF-31-328-001 | Limit Switch Kit Vac. Valve |
| 451 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 452 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 453 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 454 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 455 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 456 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 457 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 458 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 459 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 460 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 461 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 462 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 463 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 464 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 465 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 466 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 467 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 468 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 469 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 470 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 471 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 472 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 473 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 474 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 475 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 476 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 477 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 478 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 479 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 480 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 481 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 482 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 483 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 484 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 485 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 486 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 487 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 488 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 489 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 490 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 491 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 492 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 493 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 494 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 495 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 496 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 497 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 498 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 499 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 500 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 501 | TEGA-ETC-TF-80-871-146 | Chuck Rf Cable 903 |
| 502 | TEGA-ETC-TF-93-228-002 | Chuck Rf Cable 901e |
| 503 | TEGA-ETC-TF-93-228-002 | Chuck Rf Cable 901e |
| 504 | TEGA-ETC-TF-93-228-002 | Chuck Rf Cable 901e |
| 505 | TEGA-ETC-TF-93-228-002 | Chuck Rf Cable 901e |
| 506 | TEGA-ETC-TM-80-095-349 | Barathron 901 |
| 507 | TEGA-ETC-TM-80-095-370 | Barathron 903 |
SS380
S