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RCD8 SUSS Manual Coater and Developer

Equipment Inventory (Updated)

Category: Resell Products Tags: Karl Suss, Suss

Description

Description

SUSS Micro Tee Lithography GmbH RCD8 SUSS Manual Coater and Developer

Location: China

Quantity: 1 sets

Condition: It was purchased from Suss directly in 2017, After installation, the owner did trial run and then packed. So basically it is a unused tool.

Vintage: 2017

Valid Time: Subject to prior sale. First come, first service.

ID:OEM-Module-1

Facility:

Utilities: power 400 V±10%, 16 A, 50 Hz; Vaccum – 0.8 ~ – 0.6bar;CDA 6 ~ 8bar;N2 5-7 bar; DIW
Room Temperature: 20 – 22 °C (68 – 72° F)
Relative Humidity: 45 – 55 %

Configuration:

100007822P RCD8T 1PC
100008837P RCD8 COATERPACKAGE 1 PC
100008838P RCD8 DEVELOPER PACKAGE 1PC
100007823P EXTENSION MODULE FOR RCD8 T 1PC
100007824P RCD8TRAY 1PC
100007825P RCD8 STORAGE BOX 1PC
100018733P Hot plate, HP8TMMC 1PC
100018734P OPTION: HP8 PROXIMITY 1PC
100011719P OPTION: HP8 NITROGEN PURGE 1PC
100062076P RCD8 SAFETY HOOD FULLY CLOSED 2PC
100007828P GYRSET COVER OPTION WITH Z-MOVE 1PC
100007829P LIFT PIN DRIVE ASSEMBLY 2PC
100007830P MANUAL CENTERING DEVICE 2PC
100006841P FILTER UNIT FOR DEVELOPER 1PC
100006842P FILTER UNIT FOR DI-WATER 1 PC
V623007P FILTER UNIT FOR SOLVENT 1PC
100079370 PRESSURE TANK SYSTEM 5 L PE WITH COUPLING 1PC
100078691 PRESSURE TANK SYSTEM 10 L SS WITH COUPLING 1PC
V760220P WASTE CANISTER (20 L STAINLESS STEEL) 1PC

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