Description
- PECVD System, 3″-4″
- Liquid Delivery System (LDS) module
- Reactor non-functional
- Process: SiOx, SiNx , TEOS Oxide
- Single chamber
- Thermo chiller
- Gas panel type: SiH4, NH3, N2, O2, C4F8
- Gas box
- Power: 400V at 50Hz, 3P 160 A
- End point detection system
- PCW
- indows 10
- 2008 vintage.
Valid : It is only for end users and is subject to prior sale without notice. Appreciate your time!
SemiStar Corp. may provide certain information related to equipment offered for sale. Any and all such information is unverified and, therefore, supplied for information purposes only without guarantees or warranties of any kind. This picture is representative of the STS available.
SS5487-2024-2