Main Maker

Cluster ICP PECVD

Description

STS / CPX Cluster ICP PECVD, STS / CPX Cluster ICP PECVD.
1999 vintage.

  • Process: BOSCH
  • (1) ICP Chamber
  • (2) PECVD Chambers
  • BETATECH Chiller
  • CVD Gas box: CF4, O2, N2O, N2, NH3, SiH4
  • ICP Gas box: He, O2, N2, CF4, C4F8, SF6
  • Operating system: DOS and Win3.1

Condition: Used. We sell it at AS IS or complete, working, functional test .

Valid : It is only for end users and is subject to prior sale without notice. Appreciate your time!

SemiStar Corp. may provide certain information related to equipment offered for sale. Any and all such information is unverified and, therefore,  supplied for information purposes only without guarantees or warranties of any kind. This picture is representative of the STS available

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