Main Maker

Spare Parts

Categories: ,

Description

The items are subject to prior sale without notice. These items are only for end users.

No Maker Model OEM PART NUMBER
1 AD-TEC AM-2000S_C  96289B
2 AD-TEC AM-2000S_C  AM-2000S-P2-94071
3 AD-TEC AMV2000_APT  AMV2000-APT-AM06081703
4 AMAT TOP RING, NM POLY, STEPPED, 300MM EMAX 0200-02301
5 AMAT LINER, LOWER 300MM DPS2 0040-81155
6 AMAT AE Rf counter match 1110-00007
7 AMAT DOOR, RIGHT SIDE PANEL, 5.3 FI 0040-80683
8 AMAT Faceplate, 300mm, HO16 xGen 0021-14590
9 AMAT Door, SV blocker, single rod DPS II 0020-63668
10 AMAT Faceplate, LPCVD, 300mm, DCS-xZ, HD 0020-52485
11 AMAT Door Slit Valve DPS2 0040-81165
12 AMAT Blocker Plate, Unif Dist POLYGEN TUG 300 0021-08845
13 AMAT Blocker Plate, 300 mm Xgen 0021-14589
14 AMAT ASSEMBLY, WATER PLENUM, 300MM DPS2 0010-05617
15 AMAT PROBE MOUNT ASSY SAPHIRE- PROBE FOR WAFE 0190-18430
16 AMAT Ultima, HDP, 30K PM Kit 0244-00028
17 AMAT INSULATOR, 300MM SOURCE ADAPTOR, CERAMI 0200-06872
18 AMAT Cover Rotation 300mm Radiance Chamber 0020-02908
19 AMAT Ultima, HDP, 110K PM Kit 0244-00029
20 AMAT TOOL FOR LID ASSEMBLY 300MM DPS II 0270-01877
21 AMAT Ultima, HDP, ESC PM Kit 0244-00010
22 AMAT Flap, Top, Secondary, Throttle Valve 0021-04312
23 AMAT O-ring, Kalrez, 16.995, 0.210cs 3700-04706
24 AMAT Bellows Assembly, Slit Door DPSII 0040-76767
25 AMAT Gas Insert Lid Assy. 300MM DPS2 0200-04406
26 AMAT Electrical Assy DC Power Supply Drawer 0100-23802
27 AMAT Entegris valve tool kit 213-103-01
28 AMAT ETC HX FLOW SWITCH AMAT-1 GEMS 0190-00411
29 AMAT UPPER TELESCOPE, SHADOW RING, DPS II 0020-13663
30 AMAT 300mm CDA pressure switch 3300-03444
31 AMAT CDA Pressure Switch Assy, Producer 0090-02430
32 AMAT Entegris valve tool kit 213-102-01
33 AMAT C-SEAL, 3 Port Micro Seal MSA-028-311 r6 3700-03274
34 AMAT Washer Al Lift Pin 0021-26571
35 AMAT SWLL,COOLDOWN PEDESTAL WAFER SUPPORT PI 0200-00582
36 AMAT RPS Blankoff O-ring HDP 3700-03038
37 AMAT O-ring, 2.359 ID 0.139 CSD Kalrez 8085 3700-01682
38 AMAT Ultima, HDP, 30K MF PM 0244-00030
39 AMAT O-Ring ID .296 CSD .139 Kalrez 8085 3700-04704
40 AMAT Throttle Valve Coupler 0190-00618
41 AMAT O-Ring ID 2.734 CSD .139 Kalrez 8085 3700-04686
42 AMAT O-Ring ID 1.674 CSD .092 Kalrez 8085 3700-04800
43 AMAT Screw, Cap SKT HD 10-32 x 1 1/2 Torx T27 3691-01389
44 AMAT CAPTIVE SCREW, 300MM SLIT VALVE 0021-76418
45 AMAT Button, Spring Plunger, EP Window 0021-07076
46 AMAT Screw, Cap SKT HD 8-32 x 2 Torx T25 w FW 3691-01405
47 AMAT Screw, Cap SKT HD 10-32 x 5/8 Torx T27 3691-01624
48 AMAT O-Ring ID 1.110 CSD .089 Kalrez 8085 3700-04684
49 AMAT Beariing spacer, sigma 0021-07348
50 AMAT AMAT FI Service Lift Kit 0242-29971
51 AMAT SPECTROGRAPH, SD1024D-2-S, I/O, 24VDC 1400-00205R
52 AMAT SleeveSlitValve APF 0021-25781
53 AMAT Blocker APF 300mmProducer 0200-48891
54 AMAT Service Kit,300mm SIP TA, Falcon 0247-00393
55 AMAT Top Liner No Ledge 300mmAPF producer 0200-05623
56 AMAT ID-U1025E  13620,13621,13624,13638,15978
57 ASML SPARE PARTS
58 DAIHEN AMN-100_  MA9710-087
59 DAIHEN AMN-100_  MA9811-193
60 DAIHEN AMN-100_  MA9710-086
61 DAIHEN AMN-100_  MA9710-088
62 FUJI VFC506A  3242602Y179
63 Mattson Edge Grip Adapter Vers.3 Helios 3002233
64 Mattson O-ring 84 * 2 Vi500 27300113
65 Mattson Filter, PFA 1/2inVCR MMGLFPF6101VM6/8 37500017
66 Mattson Filter Micro Inline gas -, Wafergard II 37500003
67 Mattson Heaterjacket for Pall filter 230V / 42W 19201628
68 Mattson O-ring 26.7 * 1.78 Viton compound 37300039
69 Mattson O-ring 5.5 * 1.5 Vi500 27300036
70 Mattson O-ring B+S-OR2000700-V80G1 27300076
71 Mattson Washer 1/2inch nickel 37300026
72 Mattson Gasket u-sealing -, 4,9×8,6×1,0 NIRO 27300107
73 Mattson O-ring 189,87*5,33 Vi 500 27300051
74 Mattson Washer 1/4inch nickel 37300014
75 Mattson Quartz Pins 58600091
76 Mattson O-ring 9,00*2,00 ChemrazSD550 75°Shore 27300137
77 Mattson Proximity switch, inductive Helios 18800094
78 Mattson Filters for Mattson RTP Blowers 27500011
79 Mattson Stopper, wafer, jaw right Helios 1003816
80 Mattson Stopper, wafer, jaw left Helios 1003815
81 Mattson O-ring 5.8 * 1.5 Vi563 27300071
82 Mattson Fuse fine -, 5*20mm 1.0 A type T H 10800027
83 Mattson Knurled Head Screw Short (Bottom) 49501359
84 Mattson O-ring 13*2 Viton compound 500 27300079
85 Mattson Fuse Neozed -, 20A DO2 10800092
86 Mattson Fuse fine -, 5*20mm 3,15A type T 10800042
87 Mattson O-ring 255.0 * 2.0 P431,A 27300125
88 Mattson Gasket Z EAT CPU soft PVC, 485mm length 27300155
89 Mattson Fuse cap -, DC700V 25A 10800199
90 Mattson Ring center -, DN 16 KEY-FIELDS 38000056
91 Mattson Ring center -, DN 25 KEY-FIELDS 37300006
92 Mattson Fuse Neozed -, 63A DO2 10800051
93 Mattson O-ring 4 * 2.5 EPDM 27300061
94 Mattson O-ring 12 * 2 Vi500 27300029
95 Mattson Power rack fuse(square) NH00 100A 10800060
96 Mattson Gasket separate -, Pneumatics block 27300160
97 Mattson O-ring 9 * 2 Vi500 27300052
98 Mattson fuse 10A IEC60/27-2/V (1 ea = 1 Fuse) 10800043
99 Mattson O-ring, 12*1,5 Vi500 27300158
100 Mattson Sealing tape ptfe 3×1,5 27300166
101 Mattson Sealing profile 10x20mm to get jam 1m/ea 27300163
102 Mattson Neck screws -, M2,5 slot, nickel plated 11300005
103 PEARL M-20A2LS_U2  RN050209
104 PEARL M-20A2LS_U2  9733B1379
105 PEARL M-20A2LS_U2  9933B1715
106 PEARL M-20A2LS_U2  9633B0742
107 PEARL M-20A2LS_U2  9733B1389
108 PEARL M-20A2LS_U2  9733B1721
109 PEARL ZDK-916_2 BOT  9633B0885C
110 PEARL ZDK-916_2 BOT  9733B1721C
111 PEARL ZDK-916_2 BOT  9733B1389C
112 PEARL ZDK-916_2 BOT  9933B1715C
113 PEARL ZDK-916_2 BOT  9733B1379C
114 PEARL ZDK-916_2 BOT  9733B1375
115 PEARL ZDK-916_S-2 TOP  02B31B0905C
116 PEARL ZDK-916_S-2 TOP  9633B0864C
117 SemiQuarz Gas Reflection Quartz Plate 57200031
118 SemiQuarz Quartz Pin Ø=1,6, 17mm, Standard Tip 58500045
119 SemiQuarz Rotation Jet Brake (Helios) 58000022
120 SemiQuarz 300mm wafer pins 17mm lg. sharp 10° 58500053
121 SemiQuarz Top liner spacer pin (Helios) 58500057
122 SemiQuarz Bearing Si ring-tilt tray (Helios) 58500029
123 SemiQuarz Quartz Fulcrum Base (Helios) 58500059
124 SemiQuarz Pin bearing, Tray (Helios) 58500018
125 SEN GSD HE/LE 150mm ES kit
126 TEL SHIELD, DEPO Y-AL SE, GROOVE ES3D10-100910-12
127 TEL SHIELD. DEPO-UED (DT-40) ES3D10-100596-13
128 TEL SHIELD. DEPO-UED (DT-40) ES3D10-100596-13
129 TEL TMP..FT-1400W JISVG150 ES3D80-000080-11
130 TEL BOX,SHIELD BASEMATCHER NS.. ES3D10-201287-12
131 TEL BODY,UPPER ELECTRODE (420-TEMP).. ES3D10-100587-13
132 TEL PCB,I/O..TKB7031(IO SPIN MTR # Lithius CT5044-000062-12
133 TEL SPACER, GAP50 Y-AL, SE ES3D10-201706-21
134 TEL APC ASSY,VTEX ES2L87-000576-15
135 TEL CONTROL VALVE..GPF-03004 ES2L80-050092-11
136 TEL 40M/3.2M/DT-HI-POWER/MATCHER..MW2-60-0 ES3D80-000672-11
137 TEL WINDOW DEPO,CLP ES3D10-350344-12
138 TEL TMP..TMP-34043 LMC-T1 (VG250) ES3D80-000948-21
139 TEL CONTROLLER,TMP..FT-1400W ES3D80-000196-12
140 TEL PRESSURE CONTROLLER..R-04012-3-01 ES2L80-050093-31
141 TEL BLOCK,P GAS UPPER GAP50.. ES2L10-301485-11
142 TEL PIN LOCATE, EXHAUST ES3D10-400587-11
143 TEL PCV..GP100F ES2L80-050186-11
144 TEL PRESSURE CONTROLLER..R-02036-3-01 ES2L80-050093-31
145 TEL BODY,LL ARM TIBRG(C)..30HA012Z0 ES2L80-000160-13
146 TEL 90NM SCCM OXIDE DUAL GAS KIT ES3D96-151268-21
147 TEL BLOCK BALVE..FBL-20-NW25XNW16-1B4-DVR ES3D80-000240-11
148 TEL HOLDER LOCATING,T2 GAP50 ES3D10-303852-11
149 TEL COMPUTER,EMBEDDED..UA024/754Z ES050-002390-1
150 TEL BLOCK VALVE..FBL-NW25*NW16-1B4-DVF ES3D80-000147-11
151 TEL SENSOR,PRESSURE..BPG400 ES036-006618-1
152 TEL PCV..GP-100 ES2L80-000184-12
153 TEL NET, MANI LH, GND-B ES3D10-201094-13
154 TEL O-RING.. ARMOR CRYSTAL AS568A-393 A60 ES027-003819-1
155 TEL SCREW,LOCK PIN N ES3D10-401199-12
156 TEL SCREW,LOCK PIN N ES3D10-401199-12
157 TEL TUBE 1,UEL GAS LINE(OX)2.. ES2L10-300496-12
158 TEL BLOCK VALVE..FBL-20-NW16-2B3-D ES3D80-000241-11
159 TEL BOLT, CAP SCREW (M6*20) ES3D02-400155-11
160 TEL BOLT, CAP SCREW (M6*20) ES3D02-400155-11
161 TEL TYB631-1/FANR ES2L81-050061-12
162 TEL RING, SPACER INSULATOR N ES3D10-200717-13
163 TEL PF-AB LM EXH FAN ESBX81-070127-12
164 TEL TUBE 2,UEL GAS LINE P.. ES2L10-400451-11
165 TEL PLATE, STOPPER INSULATOR(C.) ES3D10-402706-11
166 TEL PIN,SUPPORT INSULATOR,FACE ES3D10-403978-12
167 TEL ETC300 TEL LL Buffer Oring KAL4079 P4BLK ES027-001438-1
168 TEL SIM,LOCK PIN ES3D10-401915-11
169 TEL FITTING PART..UJR-9.52RE-RG-O ES028-010314-1

Please contact us for more information on the product:

Your Name*:

Your Email:

Your Message:

Captchac Codecaptcha

Submit:

SS5684

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers