Description
SemiStar Spare Parts & Service
SemiStar Corp. provides spare parts, accessories, and process solutions for universities, R&D labs, pilot production lines, and 2–8 inch fabs. We work with selected equipment manufacturers, OEM partners, and technology providers to support semiconductor process, metrology, wafer handling, vacuum, thermal, plasma, and thin-film applications.
Spare Parts & Accessories Categories
| Spare Parts / Accessories Category | Product Link |
|---|---|
| Quartz, Ceramic & Silicon Components | View Products |
| Test Silicon/Aluminum Wafers / Silicon Ingots | View Products |
| Wafer Carriers & Susceptors | View Products |
| Silicon Carbide -SiC Parts | View Products |
| Robot, Controller & Pre-Aligner Accessories | View Products |
| Vacuum Pumps / Compressor Accessories | View Products |
| Chillers Accessories | View Products |
| TC wafers | View Products |
| AG Associates, AMAT, Brasnon, Brooks Equipe PRI, Gasonics, Lam, Matrix, Mattson, Novellus, Tegal, Tel |
View Products |
Valid: Subject to the sources. These are only for end users.
The trademarks of the equipment and parts contained on this page belong to the Original Equipment Manufacturers.




