Description
Refurbished MRC 8671 RF Sputtering Vacuum Deposition System
SemiStar Corp. offers a Materials Research Corporation (MRC) 8671 RF Sputtering Vacuum Deposition System for semiconductor, university, research institute, optical coating, and advanced materials thin film deposition applications.
We have one MRC 8671 sputtering system available in Morgan Hill, California, USA. Depending on customer budget and project requirements, this system may be sold in AS-IS condition or refurbished condition with warranty and installation support if applicable.
The MRC 8671 is a legacy vacuum sputtering platform suitable for RF thin film deposition, material research, process development, and laboratory coating applications.
Photos shown are for reference only. Actual configuration, options, condition, installed accessories, and final specifications may vary. Final purchase specifications are subject to formal quotation.
Availability
- MRC 8671 Sputtering System
- OEM: Materials Research Corporation
- Located in Morgan Hill, CA, USA
- Available AS-IS or refurbished condition
- Functional test available depending on purchase scope
- Warranty available for refurbished system under formal quotation terms
- Installation and startup support available if applicable
- Subject to prior sale
Sales Options
- Option 1: AS-IS condition for customers with internal refurbishment capability
- Option 2: Refurbished system with OEM specifications, warranty, and installation support if applicable
System Description
The MRC 8671 is a compact vacuum sputtering system designed for thin film deposition applications. As a legacy Materials Research Corporation sputtering platform, it can be used for research, development, and production-support applications where RF sputtering capability and vacuum deposition flexibility are required.
SemiStar can inspect, test, and refurbish the system based on customer requirements. Final configuration will depend on the installed RF power supply, matching network, cathode/source configuration, vacuum pump package, gauges, controls, and other accessories available with the system.
Typical Configuration
- MRC 8671 sputtering system frame and vacuum chamber
- RF sputtering capability
- Vacuum chamber assembly
- RF power supply and matching network, subject to final inspection
- Vacuum pumping system, subject to final inspection
- Vacuum gauges and controls
- Control cabinet and system electronics
- Process gas connections, subject to final configuration
Typical Applications
- RF sputtering thin film deposition
- Semiconductor material research
- University and institute R&D applications
- Optical coating research
- Advanced material thin film deposition
- Metal and dielectric film development, depending on configuration
- Laboratory vacuum coating applications
- Process development and pilot-scale research
Refurbishment Capability
- System inspection and condition report
- Vacuum chamber cleaning
- Vacuum leak check
- RF power supply and matching network inspection
- Vacuum pump inspection or replacement if required
- Gauge and control verification
- Electrical and interlock inspection
- Functional test before shipment if included in purchase scope
- Installation and startup support if applicable
Reference Specifications
| System Type | RF sputtering vacuum deposition system |
| OEM | Materials Research Corporation |
| Model | MRC 8671 |
| Condition | Available AS-IS or refurbished |
| Location | Morgan Hill, California, USA |
| Process Capability | RF sputtering, subject to final configuration |
| Vacuum System | To be confirmed during inspection |
| Warranty | Available for refurbished system under formal quotation terms |
Facility Requirements
- Customer is responsible for facility preparation
- Electrical power requirements to be confirmed based on final configuration
- Cooling water may be required depending on RF power and pump configuration
- Compressed air may be required depending on valve configuration
- Vacuum pump exhaust connection required
- Process gas supply and gas safety system are customer responsibility
- Rigging, utilities, exhaust, and local code compliance are customer responsibility unless otherwise specified
RFQ Information Requested
To recommend the correct purchase scope and refurbishment level, please provide:
- Substrate size and material
- Target materials
- Film thickness requirements
- Required film uniformity, if applicable
- RF sputtering process requirements
- Process gas requirements
- Required vacuum level
- Facility location and available utilities
- Preferred purchase condition: AS-IS or refurbished
- Installation and training requirements
- Expected purchase timeline
Important Notes
- All configurations and specifications are subject to final inspection and formal quotation.
- Actual installed options, RF power supply, matching network, pump package, gauges, and controls must be confirmed before quotation.
- AS-IS systems are sold without refurbishment unless otherwise specified.
- Refurbished systems may include warranty and installation support under formal quotation terms.
- All OEM names and trademarks belong to their respective owners.
- Website information is for reference only and is not final purchase specification.
Contact SemiStar
SS380-MSP-5-65
