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Quartz Parts-Part No.

AG Associates Heatpulse 4100 Rapid Thermal Processing System

AG Associates Heatpulse 4100 8108 8800 RTP

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Description

Condition: New, OEM Parts. Back order if not in stock. Appreciate your time!

Item No. Part Number Description
1 7100-1844-01D Tray 8″ Removable Pins
2 7100-4033-01B Tray 8″ Removable Pins DTC
3 7100-5727-01D Assembly Tray 8″ Removable Pins
4 7100-5730-01B Assembly Tray 6″ Removable Pins
5 7100-5897-01A Assembly Tray 6″ Removable Pins EZ-DTC
6 7100-5898-01A Assembly Tray 8″ Removable Pins EZ-DTC
7 7100-5993-02B Assembly Tray 8″ Ceramic Shield 8108
8 7100-5994-02C Assembly Tray 8″ EZ-DTC Ceramic Shield
9 7100-5995-02C Assembly Tray 6″ Ceramic Shield 8108
10 7100-5996-02C Assembly Tray 6″ EZ-DTC Ceramic Shield
11 7100-6360-01A Assembly Tray 4″ Ceramic Shield
12 7100-6361-01A Assembly Tray 5″ Ceramic Shield
13 7100-7468-01A Tray 8″ Removable Pins
14 7310-0692-02E M-Tray Slip Free 6″
15 7310-10364-01P1 Tray 6″ Susceptor
16 7310-1644-01B Tray 8″ TC Wafer
17 7310-1766-01C M-Tray Slip Free Option 4″
18 7310-1766-02C M-Tray Slip Free Option 5″
19 7310-2841-02N Isolation Tube Quartz Liner 8″
20 7310-2842-03D Isolation Tube 6″
21 7310-2843-01A Tray 8″ Removable Pins
22 7310-2881-01E Tray DTC 8″ with Pins
23 7310-2881-02E Tray DTC 8″ without Pins
24 7310-2885-01D Baffle Quartz DTC
25 7310-2908-01B Tray Quartz 5″ DTC
26 7310-2935-01A Tray Quartz 6″ DTC
27 7310-2946-01A Tray Quartz 5″ DTC No Slip Free
28 7310-2998-01A M-Tray Slip Free 3″ Wafer
29 7310-3008-02D Tray DTC 6″
30 7310-3009-01G Liner Quartz 8″
31 7310-3010-02B Liner Quartz 6″
32 7310-3027-01A Tray 6″ TC
33 7310-3452-01A Isolation Tube 8″ without ERP Window
34 7310-3575-01A Inlay Quartz
35 7310-3651-01A Tray Slip Free 4″
36 7310-4434-01A Tray 4″ 8108
37 7310-4763-01B Inlay Quartz
38 7310-4764-01B Pin Quartz Tray
39 7310-4765-02C Tray 8″ Removable Pins
40 7310-4769-01A Tray 6″ Removable Pins
41 7310-4781-01A Tray 4″ Wafer Support Pin
42 7310-5055-01B Tray 6″ Removable Pins EZ-DTC
43 7310-5056-01A Tray 8″ Removable Pins EZ-DTC
44 7310-5110-01P2 Tray Ceramic Shield
45 7310-5111-01P2 Tray Ceramic Shield
46 7310-5154-01B Tray 4″ Autoloader
47 7310-5190-02B Tray Ceramic Shield 8″ 8108
48 7310-5192-02C Tray Ceramic Shield 8″ EZ-DTC
49 7310-5193-01A Pin Ceramic Shield EZ-DTC
50 7310-5195-02B Tray Ceramic Shield 6″ 8108
51 7310-5198-02C Tray Ceramic Shield 6″ EZ-DTC
52 7310-5769-01M Isolation Tube Quartz Liner 8″
53 7310-6043-01A Tray Ceramic Shield 4″ EZ-DTC
54 7310-6046-01A Tray Ceramic Shield 5″ EZ-DTC
55 7310-6794-01A Chuck Quartz Hot EE
56 7310-6961-01P1 Isolation Tube Quartz Liner
8″ without ERP Window
57 7310-7788-01P1 Tray 3″ 8108
58 7310-8281-01A Pin Quartz 8″ Tray
59 7310-8838-01 Tray 3-6″ Susceptor
60 7310-9007-01P1 Isolation Tube Opaque Flanges
61 7310-9620-04A Tube Quartz 8800 Steam Double Contained
62 7310-9652-01U1 Tray for Autoloader EZ-DTC
63 7310-9653-01A Isolation Tube Opaque Quartz Liner
64 7310-9653-01P1 Isolation Tube Opaque Quartz Liner
65 7310-9817-02P2 Tray Ceramic Novellus 8″
66 7310-9887-01P1 Isolation Tube Quartz Liner Thk Flange
67 7310-9922-01P1 Susceptor Tray with TC
68 7400-0003F Tray 5″ Wafer – 610
69 7400-0004G Tray 4″ Wafer – 410
70 7400-0008E Tray 4″ Wafer – 610
71 7400-0010H Tray Research – 610
72 7400-0011G Ga As Research Tray – 410
73 7400-0012C Wafer Pin Support – 410, 610
74 7400-0013D Cover Research Tray – 410
75 7400-0017D Cover Research Tray – 610
76 7400-0019F Tray 3″ Wafer – 610
77 7400-0020D Tray 4″ – 2106
78 7400-0022B Tray 6″ – 2106
79 7400-0023-01M Tube Isolation
80 7400-0024-01C Rod Quartz 3.50
81 7400-0024-02C Rod Quartz 2.55
82 7400-0024-03C Rod Quartz 0.45
83 7400-0024-04C Rod Quartz 0.40
84 7400-0035C Plate Thermocouple Holder
85 7400-0036F Inlay – Floating Door
86 7400-0046C Pin Quartz Vac Pan
87 7400-0060-01G M-Tray 4″
88 7400-0060-02G M-Tray 5″
89 7400-0060-04G M-Tray 3″
90 7400-0061-02C Pin Wafer Cooling Station
91 7400-0062-01G M-Tray Auto 6″
92 7400-0063-04H M-Tray Manual System 2″ – 610
93 7400-0063-05H M-Tray Manual System 3″ – 610
94 7400-0063-06H M-Tray Manual System 4″ – 610
95 7400-0063-07H M-Tray Manual System 5″ – 610
96 7400-0063-08H M-Tray Manual System 2″ – 410
97 7400-0063-09H M-Tray Manual System 3″ – 410
98 7400-0063-10H M-Tray Manual System 4″ – 410
99 7400-0066-02 Isolation Tube ERP Manual Systems
100 7400-0066-03N Isolation Tube ERP Manual Systems
101 7400-0068-04N Isolation Tube Dual Perf Baffle
102 7400-0082-01F M-Tray 6″ Manual Systems
103 7400-0084-03C Tray Ga As Susceptor Manual System – 410
104 7400-0084-04C Tray Ga As Susceptor Manual System – 610
105 7400-0085-07M M-Tray Slip Free Option 4″
106 7400-0085-08M M-Tray Slip Free Option 5″
107 7400-0085-09M M-Tray Slip Free Option 6″
108 7400-0089-01B Pin 3″ Wafer Cooling Station
109 7400-0097-05C Tray Slip Free Manual System 4″
110 7400-0097-06C Tray Slip Free Manual System 5″
111 7400-0097-07C Tray Slip Free Manual System 6″
112 7400-0100-06K Isolation Tube
113 7400-0101-06R Tray 8″
114 7400-0102-01C Inlay Quartz
115 7400-0104-02C Susceptor Tray 4100
116 7400-0105-01C Support Pin
117 7400-0105-02C Support Pin
118 7400-0106-06J Tray 6″
119 7400-0107-01A Tray TC Inconel 5″
120 7400-0108-01B Pin Support Cover
121 7400-0109-06K Tray Slip Free 5″
122 7400-0111-01E M-Tray Auto 6″
123 7400-0123-01C Susceptor Tray Autoloader 6″
124 7400-0132-01C Inlay Floating Door
125 7400-0133-03G Tray 8″ Removable Pins
126 7400-0134-01C Pin Quartz 8″ Tray
127 7400-0136-01B Baffle Quartz
128 9000-0670 REV 1 Tray 4″ Wafer
129 9000-0690 REV 1 Tray 5″ Wafer
130 9000-0860A Tray 6″ Wafer
131 9010-0020 REV 2 Wafer Pin Support
132 9010-0050 REV 2 Wafer Cover
133 9010-0130C Diffusion Tube
134 9010-0270 REV 2 Pin Support Sample
135 9010-0300 REV 6 Tray Research 4″ Wafer
136 9010-0420 REV 2 Tray 4″ Wafer
137 9010-0440C Plug
138 9020-0060-01K Tube Quartz
139 9020-0070E Tray 4″ Wafer
140 9020-1920A Pin
141 9030-0200H Chuck II
142 9030-0350C Pin Quartz
143 9030-0380D Tray 4″ Wafer

Valid Time: Subject to prior sale. Check the lead time for new PO.

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