Description
MULTIPLEX RANGE OF MACHINES for STS ICP RIE PECVD (MULTIPLEX AOE, MULTIPLEX CVD,MULTIPLEX HRM,MULTIPLEX ICP,MULTIPLEX RIE)
- CLAMPING RING
- ICP LOWER ELECTRODE BASE / STEM ASSEMBLY Part Number: a12516C03
- ICP LOWER ELECTRODE BOTTOM INSULATOR Part Number: a12516C03
- ICP LOWER ELECTRODE BOTTOM PLATE ADAPTER Part Number: DT303802
- ICP LOWER ELECTRODE CLAMPING RING Part Number: 112518C01
- ICP LOWER ELECTRODE COOLANT PIPES Part Number: DT303056.02
- ICP LOWER ELECTRODE HELIUM MANIFOLD Part Number: 111725E02
- ICP LOWER ELECTRODE JOINER ROD Part Number: DT303803.01
- ICP LOWER ELECTRODE SHIELD Part Number: 112450e01
- ICP LOWER ELECTRODE STEM GUIDE Part Number: 111996DO3
- ICP LOWER ELECTRODE STEM SPLIT RING Part Number: 112009E01
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for the availability and more info pls. Appreciate your time.
ID-SS9183

