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MULTIPLEX RANGE OF MACHINES for STS ICP RIE PECVD

Description

MULTIPLEX RANGE OF MACHINES for STS ICP RIE PECVD (MULTIPLEX AOE, MULTIPLEX CVD,MULTIPLEX HRM,MULTIPLEX ICP,MULTIPLEX RIE)

  • CLAMPING RING
  • ICP LOWER ELECTRODE BASE / STEM ASSEMBLY Part Number: a12516C03
  • ICP LOWER ELECTRODE BOTTOM INSULATOR Part Number: a12516C03
  • ICP LOWER ELECTRODE BOTTOM PLATE ADAPTER Part Number: DT303802
  • ICP LOWER ELECTRODE CLAMPING RING Part Number: 112518C01
  • ICP LOWER ELECTRODE COOLANT PIPES Part Number: DT303056.02
  • ICP LOWER ELECTRODE HELIUM MANIFOLD Part Number: 111725E02
  • ICP LOWER ELECTRODE JOINER ROD Part Number: DT303803.01
  • ICP LOWER ELECTRODE SHIELD Part Number: 112450e01
  • ICP LOWER ELECTRODE STEM GUIDE Part Number: 111996DO3
  • ICP LOWER ELECTRODE STEM SPLIT RING Part Number: 112009E01

Valid time: Subject to prior sale without notice.

Contact us (sales@semistarcorp.com) for the availability and more info pls. Appreciate your time.

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