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Leybold LAB 600

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Description

Description

The Leybold LAB 600 EB E Beam Evaporator Ion Assist Turbo Pumped High Vacuum Thermal Evaporator, Physical Vapor Deposition (PVD) is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. The item is only for end users. Appreciate your time!

Location: USA

Condition: Used. We can sell it at (1) AS IS; (2) Complete, Working, Functional Test at different prices.

More Info: Pls email us with your company name, location, website, company email address and RFQ in detail if possible.

Info below is for your reference.

Leybold LAB 600 EB E Beam Evaporator Ion Assist Turbo Pumped

E Beam Power Supply:14 kV
1 of Guns Controlled,Four Pocket
Vacuum System
Leybold Turbovac T1600 pump/controller
Edwards QDP40 dry pump
Leybold Ruvac WSU251
Gas Inputs Two,Mass Flow Controllers
Film Thickness Monitor
Chamber: 23″W x 23″D x 29″H
E-gun: ESV14 with 4 pocket crucible
Ion source: Commonwealth Mark II
Commonwealth N2000 Neutralizer power supply
Model 5000 hollow cathode electron source
Leybold IC5 deposition controller
Lebyold EGC28 electron beam evaporator controller
Dual crystal sensor
PLC+PC visualization
Schnider E-Technik Hi voltage power supply
Brooks Instrument 0151E Flow controller
GWK recirculating chiller
Polycold chiller m/n 552
Planetary for (15)-2″ wafers
CE
Exterior Dimensions
Width 37″
Depth 57″
Height 83″
Weight 1,500LB

ID-SS5732W

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Metrology | Tester | Wafer Carriers
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