Description
Kloé UV-KUB 3, 6-inch mask aligner available for sale.
The system was operational when removed from production service. It is being decommissioned from a semiconductor fab and may be available as a complete system. It has very low usage
Location: USA
Availability: Complete system
Please contact SemiStar for additional specifications, photos, configuration details, pricing, and availability.
Configuration
Kloé UV-KUB 3, 6-inch mask aligner. 365 nm UV-LED exposure source, 35 mW/cm². Accepts substrates up to 6” and photomasks up to 7”. Resolution 1 µm with 1 µm alignment accuracy. Dual CCD camera alignment system, touchscreen interface, USB control joypad and embedded PC with automatic pre-alignment and alignment-mark storage. XYZ/θ motorised substrate positioning. Compatible with standard photoresists including AZ, Shipley and SU-8. Compact standalone system.
OEM Model Description
The mask aligner UV-KUB 3 is the first mask alignment system equipped with a UV-LED light source, that provide an unrivalled collimation and homogeneous exposure, on the international market. Compact, easy to use and efficient, the mask alignment system UV-KUB 3 allows alignment up to 7″ photolithography mask with substrates up to 6″ in a cube volume of 48cm size.
Valid Term: These are subject to prior sale. These are only for end user. Appreciate your time.
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SS7464-Fox-9/30/2026