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SemiStar Corp

KLA-Tencor, SP1, DLS KLA-Tencor, SP1, DLS

Categories: Make Offers, Metrology, Resell Products

Description

Description

Model: SP1-DLS / Surfscan SP1 DLS ( KLA-Tencor, SP1, DLS KLA-Tencor, SP1, DLS )

Maker: KLA-Tencor

Condition: Installed in the fab. Powered Down

Process: Contamination detection

Vintage: 2004

Software Version: 4.20.7199

CIM: Yes

Price: Make offer

Photos : Pls contact us

Hardware Configuration:

Main mini environment Platform (1 set)
Asyst IsoPort SMIF Sytems (2 sets)
Asyst Axys Model 21 Robot Handler System, Refurbished in 2018 (1 set)
Argon Laser JDS Uniphase 75mW (OK)
Chuck Edgegrip (OK)
Bright Field Option,Never used, Not calibrated (1 set)
Backside Contamination Option (Edge Handling System + Flipper Aligner) (1 set)
E84 Standart for Overhead Loadsystem (1 set)
NO missing/faulty parts/accessories

The items are subject to prior sale without notice. These items are only for end users.

SS-6327

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