Description

Model: Hitachi CD-SEM S-8840

The items are subject to prior sale without notice. These items are only for end users.

Category:  CD-SEM

Original Equipment Manufacturer: Hitachi

Condition: Used, Complete, working condition. PM and Fully tested by seller

Valid Time: Subject to prior sale

Lead Time: 6 to 10 weeks

Location: Silicon Valley, CA, U.S.A.

Warranty: 90 days non-consumable parts

Installation and training: Available at extra charge

Service Contract: Available at extra charge

Original Hitachi CD-SEM 8840  Specification and Key Features:

1. Hitachi CD-SEM S-8840 General

   • Wafer size :  8-inch or 6-inch (Special carrier for 2 to 5 inch wafers)
   • Principle of CD measurement : Cursor and line profile measurement
   • CD measurement range : 0.1 to 10 μm
   • CD measurement reproducibility : ±1% or 0.005 μm (3 sigma) (threshold method),whichever larger
   • Throughput : 26 wafers/hour (in continuous measurement),1 point/chip, 5 chips/wafer
   • Secondary electron image resolution : 5 nm (50 Å) (at accelerating voltage of 0.8 kV with reference specimen dedicated for resolution measurement)
   • Magnification : x1000 to  x150,000 (SEM image), About x110 (optical microscope image)

2. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Specimen Stage

   • Movement range : X and Y ; 0 to 200 mm
   • Stage drive : Pulse motor
   • Control and speed : Computer-controlled operation, max. speed 50 mm/s

3. Hitachi CD-SEM S-8840 Wafer Loader

   • Wafer transfer from cassette to loader chamber : Auto transfer via cassette-to-cassette auto loader
   • Wafer transfer from loader chamber to stage : Auto evacuation and auto loading

4. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Cassette-to-Cassette Auto Loader

   • Principle of loading : Loading via arm type robot for random access using two cassettes
   • Chucking : Vacuum chucking on back of wafer
   • Orientation flat setting : Non-contact auto detection via optical sensor

5. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Electron Optics

   • Electron gun : Schottky emission type (having high brightness and long service life)
   • Accelerating voltage : 500 to 1300 V (variable in 10 V steps)
   • Lens system : Electromagnetic condenser lens system, FCM objective lens
   • Secondary electron detection : 2-stage detection system
   • Objective lens aperture : Heating type movable aperture (4 openings selectable outside column), fine adjustment possible
   • Scanning coil : 2-stage deflection
   • Stigmator coil : 8-pole electromagnetic type (X, Y)
   • Probe current monitoring : Faraday cup incorporated, with automatic measurement function
   • Optical microscope : 1.2-mm-square visual field, monochrome image

6. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Control and Display System

   • Viewing control CRT : EWS (GUI) 20-inch monitor, integral processing image display, interactive computer operation, wafer map display, measured value indication, stage coordinate indication, etc.
   • Scanning modes : TV scan, raster rotation, auto brightness/contrast control
   • Photographing : Photographic recording unit, effective visual field 80 x 80 mm (option)
   • Safety device : Equipped with emergency shut-off switch

7. Hitachi CD-SEM S-8640 CD Measurement Data Processing System (1 GB hard disk for system program)

   • File storage : 3.5 inch floppy disk drive, 3.5 inch magneto-optic disk drive, with storage function for various parameter files
   • Data processing : Average value, standard deviation, maximum/minimum values
   • Printout : 80-character thermal printer
   • Hard disk capacity varies with instrument serial no

8. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Vacuum System

   • Principle of evacuation : Full-automatic dry and clean evacuation
   • Vacuum pumping : Ion pump (3 units), turbo molecular pump (2 units), rotary pump (option)(with foreline trap) (2 units)
   • Safety device : Equipped with power fail/vacuum level safety devices

9. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Dimensions

   • Main column unit : 1170W x 1890D x 1650H mm, 1100 kg
   • Display unit : 600W x 1331D x 1800H mm, 320 kg
   • Power supply unit : 535W x 600D x 1500H mm, 200 kg
   • Rotary pump(option) : 360W x 640D x 520H mm, 30 kg/unit

10. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Standard System Composition

    • Main column unit • • • • • • • • • • • • • • • • • • • • • 1
    • Display unit • • • • • • • • • • • • • • • • • • • • • • • • • 1
    • Power supply unit• • • • • • • • • • • • • • • • • • • • • 1
    • Photographing unit (option)• • • • • • • • • • • • • •1
    • Rotary pump (option) • • • • • • • • • • • • • • • • • • 2
    • Instruction manual • • • • • • • • • • • • • • • • • • • • 1

The items are subject to prior sale without notice. These items are only for end users.

All the Hitachi CD-SEM  S-8620 HIGH RESOLUTION FEB CD MEASUREMENT equipment  trademarks belongs to Hitachi,Ltd, the original equipment manufacturer. All rights reserved