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PVA TePla GIGA 690

Description

Description

We are selling here a used GIGA 690 from PVA TePLA. The GIGA 690 is a MICROWAVE PLASMA SYSTEM.

PROCESS CHAMBER

 Material Aluminum

 Volume 91 liters

 Inner dimensions 450 x 450 x 450 mm

 No RF- electrodes inside the chamber

VACUUM SYSTEM

 Vacuum connection DN 63 ISO K

 Process gas control 2 gas channels standard,

 each with MFC and solenoid valve

 Base pressure Approx. 2 x 10-2 mbar

 Process pressure Approx. 0.2–2 mbar

 Evacuation time Approx. 1 minute

 Vacuum gauge Capacitance manometer,

Location: Germany

Condition: We sell this item AS IS.

These are subject to prior sale. These are only for end user. Appreciate your time.

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

OEM-1-1

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PVA TePla GIGA 690

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