Description
CHA MARK 50 E-BEAM EVAPORATOR ( CHA MARK 50PLC Model)
Condition: Used,Refurbished with warranty and installation
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for the availability and more info pls. Appreciate your time.
Description:
- Can be automatic, manual, and maintenance modes
- Crucible: 6-Pocket, 25cc Pockets
- Process Chamber Size: 32’’ x 32’’
- Ion source with Ar MFC and controller
- 8” Lift off Dome. Others are optional.
- Shutter Assembly, Single Vane Style
- TT-10 E-Beam Power Supply and controller
- CHA Hi-Vac valve
- Telemark Sweep Controller
- Telemark Indexing Controller
- Telemark 861 Deposition Rate Controller
- Inficon Crystal Sensor Assembly
- InstruTech Multi Gauges with direct signal to PLC.
- Siemens PLC Control System (Recipe Drive, Touchscreen)
- CTI CT-400 Cryo Pump, CTI compressor
- 208 VAC, 5 wire 50/60Htz
SS0992-OEM-0-P-1-1, SS380EB-CHA Mark 50 Vacuum Evaporator, 4″, 6″