Description
Please contact us for the availability of the following used AG ASSOCIATES HEATPULSE 2146 Rapid Thermal Processor
The items are subject to prior sale without notice. These items are only for end users.
| Manufacturer | AG Associates |
| Model | Heatpulse 2146 |
| Description | Single Chamber RTP Tool |
| Cassette to Cassette | YES |
| Other Information | Wafers from 3″ to 6″ Configured for 4″ wafers Temp. range: 700 to 1220°C Cooling rate: 80°C/sec (programmable) Auto cassette to cassette wafer handling |
| Condition | Very Good |
| Width | 36 inch |
| Depth | 40 inch |
| Height | 47 inch |
| Weight | 800 lb |
The items are subject to prior sale without notice. These items are only for end users.
SS5732