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8″ Plasmatherm Versaline ICP

Categories: Etcher, Resell Products Tag: Plasma-Therm

Description

Description

8″ Plasmatherm Versaline ICP

Condition: New, never used. We sell it at AS IS or complete/working/functional test

Vintage: 2021

Lead time: Ready to go.

OEM Name: Plasmatherm

Quantity: 1

Photos: Please email us.

Description from the owner for your reference:

Control System
1 Cortex® Control System for VERSALINE®
1 Cortex® Control System Software
1 GLANCE™ Data Acquisition Connectivity, 6-Month Trial GLANCE™ Data Acquisition System,
1 Basic System
Handler
1 Semi-Auto Load-Lock Handler
1 Ballroom Install Pkg, Load-Lock, Mobile Cart
1 Substrate Handling Kit, LLH, Etch, 76 … 200mm
1 Rough-Vacuum Pump Package, Anest Iwata ISP-500C, Local Install
Process Module, ICP
1 VERSALINE® ICP-Etch Base Process Module
1 Heated ICP Source w/ Medium-Power (2.0kW) RF Pkg.
1 Level 1 • Low Maintenance Package, ICP-RIE
1 Level 2 • Low Maintenance Package, ICP-RIE
1 Vacuum Train, STP-A1303C Turbo
1 Integration Pkg., Mechanical Substrate Clamp, Standard Electrode
1 Wafer Change Kit, Mech. Clamp, 200mm(8″)
Process Module, ICP
1 Temperature Management System, Etch, -20 to +60°C
1 Dry Backing Pump C1,600L) & Local Interconnection

Subject to prior sale without notice. Appreciate your time

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

OEM-Module

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