Top

OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
Electroglas
F.E.I.
Gasonics
Glow-Research
HP Agilent
Hitachi
KLA-Tencor
Lam Research
Matrix
MRC
NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
Tegal
Temescal
TES
Tystar
USIC -Wafers
Pumps
Chillers
Si Wafer Carriers
Wanted Equip&Parts

Navigation

SemiStar Corp. Semiconductor Equipment Parts Service

Home

menu

About Us
Plasma Etch
RTP
- New Vacuum RTPs
- Refurbished RTPs
Furnace
- New Furnace LPCVD
Thin Film
Cleaning
- New Wet Cleaning
- New Dry Cleaning
Metrology
Parts
Marketplace

Return to Content

You are here: Home > Refurbished Hot Main Items

Refurbished Hot Main Items

Showing 25–36 of 133 results

Grid view List view

Upgrade Kits-Matrix

Read more
Upgrade Kits-Tencor

Read more
Upgrade Kits-Tegal2

Read more
Upgrade Kits-Tegal

Read more
Upgrade Kits-RTP

Read more
ESC-200 Controller

Read more
ESC-100 Controller

Read more
ATM-104 Robot

Read more
ATM-105 Robot

Read more
Multiplex ICP HRM

Read more
STS / CPX ICP Etcher

Read more
ICP HRM Multiplex

Read more

← Previous 1 2 3 4 … 12 Next →

We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

USIC

AG Associates Rapid Thermal Processors — Rapid Thermal Processors

Tystar

Sputter Deposition Equipment

Wafer Carriers: 2 - 18 inch

NanoMaster ALD DRIE PECVD RIE

Spare Parts Service

STS ICP DRIE Bosch RIE PECVD

Matrix 105 Matrix 303 Asher Etcher

Main Used Refurbished Equipment

Evaporators

© 2025 SemiStar Corp.. All Rights Reserved.

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers