SemiStar Corp. supplies semiconductor spare parts, accessories, consumables, and process support solutions for universities, R&D laboratories, pilot production lines, and semiconductor fabs. We support RTP, plasma, vacuum, wafer handling, metrology, deposition, etching, thermal processing, and thin-film applications.
Semiconductor Equipment Spare Parts & Accessories Categories
| Spare Parts / Accessories Category | Product Link |
|---|---|
| AG Associates Heatpulse RTP Parts | View Products |
| Carriers: 4″ to 18″ Si Wafer & Susceptors & SiC components | View Products |
| Robot, Controller & Pre-Aligner Accessories | View Products |
| Quartz, Ceramic & Silicon Components | View Products |
| USIC Test Silicon Wafers / Aluminum Wafers / Silicon Ingots | View Products |
| Silicon Carbide (SiC) Parts | View Products |
| Vacuum Pumps / Compressor Accessories | View Products |
| Chillers & Heat Exchanger Accessories | View Products |
| TC Wafers | View Products |
| AMAT, Branson, Brooks, Equipe, PRI, Gasonics, Lam, Matrix, Mattson, Novellus, Tegal, TEL Parts | View Products |
Valid: Subject to the relationship with partners. These are only for end users. The trademarks of the equipment and parts contained on this page belong to the Original Equipment Manufacturers.