SemiStar Corp. supplies semiconductor spare parts, accessories, consumables, and process support solutions for universities, R&D laboratories, pilot production lines, and semiconductor fabs. We support RTP, plasma, vacuum, wafer handling, metrology, deposition, etching, thermal processing, and thin-film applications.
Semiconductor Equipment Spare Parts & Accessories Categories
| Spare Parts / Accessories Category | Product Link |
|---|---|
| AG Associates Heatpulse RTP Parts | View Products |
| Wafer Carriers & Susceptors | View Products |
| Robot, Controller & Pre-Aligner Accessories | View Products |
| Quartz, Ceramic & Silicon Components | View Products |
| Test Silicon Wafers / Aluminum Wafers / Silicon Ingots | View Products |
| Silicon Carbide (SiC) Parts | View Products |
| Vacuum Pumps / Compressor Accessories | View Products |
| Chillers & Heat Exchanger Accessories | View Products |
| TC Wafers | View Products |
| AMAT, Branson, Brooks, Equipe, PRI, Gasonics, Lam, Matrix, Mattson, Novellus, Tegal, TEL Parts | View Products |
Important Notes
Valid: Subject to source availability. Products and spare parts listed are primarily for end users.
The trademarks of the equipment and parts contained on this page belong to their respective Original Equipment Manufacturers.