Description
Our platens use patented technology, providing superior performance and uniform heating. NANO-MASTER platens are RF biasable, water-cooled, and temperature controlled with models ranging from 300°C to 700°C. Heights are adjustable in certain platens and substrate can be turned with no wires or leads are in the vacuum side. There is no shorting or arcs because all leads, thermocouples and water lines are kept in atmosphere. NANO-MASTER platens can be directly installed into your system.Different models allow for different temperature limits:
- NM-LTP – Low Temperature Platen heatable up to 300°C
- NM-MTP – Mid Temperature Platen heatable up to 500°C
- NM-HTP – High Temperature Platen heatable up to 700°C
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| Low Temperature Platen | Mid Temperature Platen | High Temperature Platen |
The trademarks of the equipment and parts contained on this page belong to the Original Equipment Manufacturers.
Nano-Master Main Equipment: Thin Film | Etch | Cleaning | Space Simulation | Hybrid
SS10840
