Description
Please contact us for the availability of the following parts and service. These are only for end users. Appreciate your time.
- Models: AST elektronik Steag Mattson SHS10, SHS100,SHS1000, SHS2000, SHS2800, SHS2800E, SHS2900, SHS3000, HELIOS, LPA
- Parts
- Circuit cards
- Computer cards
- Equipe Aligner Rebuild
- Equipe Robot Rebuild
- Hard Drives
- ILC computers
- IPC computers
- Lamps
- Power Supplies
- Quartzware
- Robot End Effectors
- Slip Guard Rings
- TC Wafers
- Technical Support, Installation, Maintenance, Repair, Training, Instruction, Process
- Your equipment is down and you need someone for field service.
- Tool and Process Issues to Error codes and Part numbers.
- Training on Equipment ,Process, Hardware, Software, Recipe, Calibration, and Uniformity issues.
- Brooks Equipe / PRI 104/105/305/307 robot and the Brooks Equipe / PRI 101/201/301 aligners repaired and refurbished. New belts, bearings, seals, with a long enough cycle test with the correct OEM Macro and parameter files installed .
The trademarks of the equipment and parts contained on this page belonged to THERMCO, the Original Equipment Manufacturers.
ID-SS10214
