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Tegal Chamber Parts

Description

Pls tell us PN, Description ,Quantity, and photos if possible. We will provide quotation accordingly. Appreciate your time. These are only for end users.

Our partner in USA is a leading supplier of second source parts for Etch and CVD wafer-processing machines. The company manufactures high-tolerance parts to meet the needs of the semiconductor industry, and is a major supplier of parts to leading FABs in USA.

OEM OEM-Part-Number Part-Description
Tegal 37-221-001 Upper Electrode
Tegal 37-221-002 Upper Electrode
Tegal 39-927-007 Tegal 903e lower electrode
Tegal 39-927-008 Tegal 903e lower electrode
Tegal 37-221-003 Upper Electrode
Tegal 39-680-003 Upper Electrode
Tegal 39-733-004 Tegal 903e lower electrode
Tegal 39-735-003 Tegal 903e lower electrode
Tegal 39-735-004 Tegal 903e lower electrode
Tegal 39-741-009 Tegal 903e lower electrode
Tegal 39-741-010 Tegal 903e lower electrode
Tegal 39-741-026 Tegal 903e lower electrode

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