Description
KLA Tencor P6 with Dongle and Computer .
Condition: Used. We sell it at Complete, working, functional test .
More Photos: Pls contact us via email for more photos if necessary.
Location: Morgan Hill, CA USA
OEM Name: KLA Tencor
Quantity: 1
Information from website for your reference.
The P-6 Tencor Surface Profiler offers a combination of advanced features for process development and manufacturing control of scientific research, photovoltaic solar manufacturing, data storage, MEMS, opto-electronics, and other industrial metrology applications. The P-6 stylus profiler and surface analysis system utilizes numerous platform and measurement technologies from KLA-Tencor’s most advanced semiconductor profiler systems for surface topography analysis. It has a programmable scan stage, low noise, and high quality, high resolution long scans. It is a smaller, more economical design for substrates up to 150mm.
Key Features:
- 150mm scan length without stitching and 1 mm Z range
- Capacitive sensor-LVDC with a sub-Angstrom resolution
- Step height repeatability of 6Å
- Stylus force: 0.5-50mg (constant stylus force during scan)
- 4.0X, 0.12NA Top view objective lens
- Stylus 2.0µm 60 degree radius
- Vibration isolation table
- Vacuum sample hold-down
- Thin and thick film step height
- Photo resist/soft films
- 3D imaging
- 2D stress analysis with locator
- Defect review and defect analysis
- Flatness or curvature
- Etched trench depth
- Materials characterization for surface roughness and waviness
Specifications:
- 150mm scan length without stitching
- Low noise, high resolution
- 3D imaging
Subject to prior sale without notice. Appreciate your time
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
- SS-000Auc-Fab.-19 / MSP-29500
