Description
HTG 3000A contact/proximity Mask Aligner with <1um accuracy for up to 150mm substrates
- Tooling included:
5.25″x5.25″ maskholder
4″x4″ vacuum chuck
Location: CA, U.S.A.
These are subject to prior sale. These are only for end user. Appreciate your time.
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
- Series 80 UV light source
- Olympus microscope with illuminator
- X,Y,Theta alignment with differential micrometers
- Can be configured with tooling for up to 6″ diameter substrates and 7″x7″ masks
- 350w lamphouse: 365/405nm exposure
- pneumatic mask assembly lift
SS7270-1-2-1-1 and SS7270W
