Description
Plasma Etcher, Plasma etching system, March plasma system, March CS-170, RIE:
- Large chamber–comes with ceramic isolation ring that allows for 150mm (6”) or smaller wafers). A larger 8” ceramic ring is available as an option.
- 0-600 watts of power (AE RF generator RFX-600)
- Automatic tuning
- Has two MFC’s–gas 1: Porter N2 50 SCCM, Gas 2 Porter N2 100 SCCM
- Two more MFC’s can be added (for a total of four)
- Has N2 purge
- The chamber is a two piece clam-shell type and the material to be etched is placed on the bottom powered electrode mounted in the center of the base of the chamber.
- The size ratio of the small powered electrode to the larger ground electrode produces a negative DC bias which enhances ion bombardment and anisotropy.
- The focus ring confines the plasma on the bottom electrode, thus optimizing power utilization.
- The bottom electrode is water cooled to maintain the sample at a low temperature during processing.
- The chamber is equipped with a new circular quartz viewing window for observation of the plasma process, or mounting of a mass spectrometer
- The view port window quartz has been treated with a Glow Research proprietary film to block out UV (for safety)
- The primary chamber material is anodized aluminum; other components are manufactured from ceramic and quartz.
- A 25 cfm to 50 cfm vacuum pump with Fomblin type oil is recommended. This optional pump can be quoted upon request.
- A 2 gpm @ 6 psi chiller cooling at 50-60 degrees C is recommended. This optional chiller can be quoted upon request.
- Shipping can be arranged world-wide
- Glow Research will supply a sturdy custom crate ready for international shipment
- Glow Research will supply a manual, instructional video on proper operation and phone support for proper hook-up and operation
- Process support is available at contract rates by qualified process engineers
- System has been electronically tested, vacuum tested (leak back test, helium leak detector) and has passed a rigid final testing.
- System is ready to process.
Condition: Complete,working
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-SS380-e