Description
Varian 3118 Electron Beam Evaporator Thin Film Deposition System
SemiStar Corp. offers a Varian 3118 Electron Beam Evaporator System for semiconductor, university, research institute, compound semiconductor, optical coating, and advanced materials thin film deposition applications.
This system was previously operational at a Silicon Valley semiconductor fab before being moved to storage.
Depending on customer budget and project requirements, the system may be sold in:
- AS-IS condition
- Complete, working, functional test condition
- Refurbished condition
Please contact SemiStar Corp. for current configuration details, availability, refurbishment scope, and quotation.
Photos shown are for reference only. Actual configuration, installed accessories, options, and condition may vary. Final specifications are subject to formal quotation.
Availability
- Varian 3118 electron beam evaporator system
- Previously operational at Silicon Valley fab
- Available AS-IS condition
- Available complete, working, functional test condition
- Available refurbished condition
- Warranty available for refurbished system under formal quotation terms
- Installation and startup support available if applicable
- Subject to prior sale
Current Configuration
- Varian 3118 electron beam evaporator system
- CHA heater power supplies
- Varian SCR power supplies
- LN2 control system
- Deposition control system
- Fixture control system
- Edwards Temescal CV-GSLX high voltage power supply
- Temescal beam controller with remote
- Neslab ThermoFlex 2500 chiller-Not included
- Pfeiffer Adixen ACP 28 dry vacuum pump-Not included
- CTI Cryogenics cryo compressor
- Slot rotating substrate holder
- Planetary shields configuration
System Description
The Varian 3118 is an electron beam evaporation platform designed for semiconductor thin film deposition, optical coating, compound semiconductor processing, lift-off applications, and advanced materials research.
This available system includes electron beam evaporation capability together with substrate rotation, deposition controls, cryogenic vacuum pumping support, LN2 control, and fixture control configuration.
The included slot rotating substrate holder and planetary shield configuration may support improved deposition uniformity depending on substrate size, process setup, tooling configuration, and application requirements.
Electron Beam Evaporation Configuration
- Electron beam evaporation process capability
- Edwards Temescal CV-GSLX high voltage power supply
- Temescal beam controller with remote
- CHA heater power supplies
- Varian SCR power supplies
- Deposition control system
- Fixture control system
- LN2 control system
- Slot rotating substrate holder
- Planetary shields configuration
Vacuum System Configuration
- Pfeiffer Adixen ACP 28 dry vacuum pump-Not included
- CTI Cryogenics cryo compressor
- High vacuum thin film deposition capability
- Cryogenic vacuum pumping support
- Neslab ThermoFlex 2500 chiller-Not included
Typical Applications
- Electron beam thin film deposition
- Metal evaporation
- Compound semiconductor processing
- Optical coating research
- Lift-off process applications
- Semiconductor material research
- University and institute R&D applications
- Advanced materials development
- Laboratory vacuum coating applications
Reference Specifications
| System Type | Electron beam evaporator thin film deposition system |
| OEM | Varian |
| Model | 3118 |
| High Voltage Power Supply | Edwards Temescal CV-GSLX |
| Beam Controller | Temescal beam controller with remote |
| Heater Power Supplies | CHA heater power supplies |
| SCR Power Supplies | Varian SCR power supplies |
| Vacuum Pump | Pfeiffer Adixen ACP 28 dry vacuum pump-Not included |
| Cryogenic Pumping | CTI Cryogenics cryo compressor |
| Chiller | Neslab ThermoFlex 2500-Not included |
| Substrate Configuration | Slot rotating substrate holder with planetary shields |
| Condition | Available AS-IS, functional tested, or refurbished |
Sales Conditions
AS-IS Condition
- System sold in current condition
- No refurbishment included unless separately quoted
- Recommended for customers with internal engineering and refurbishment capability
- Final included components to be confirmed before purchase
Complete, Working, Functional Test Condition
- System inspected and functionally tested before shipment
- Basic operating functions verified based on agreed scope
- Electron beam evaporation function test available
- Final acceptance criteria to be defined before purchase order
Refurbished Condition
- System inspection and condition report
- Vacuum chamber cleaning
- Vacuum leak check
- Electron beam source inspection
- Power supply verification
- Vacuum and cooling system verification
- Electrical and interlock inspection
- Functional test before shipment
- Warranty available under formal quotation terms
- Installation and startup support available if applicable
Facility Requirements
- Customer is responsible for facility preparation
- Electrical power required
- Cooling water required
- Vacuum pump exhaust connection required
- Compressed air and LN2 supply may be required depending on final configuration
- Rigging, utilities, exhaust, and local code compliance are customer responsibility unless otherwise specified
RFQ Information Requested
- Preferred purchase condition: AS-IS, functional tested, or refurbished
- Substrate size and material
- Deposition materials
- Film thickness requirements
- Required deposition rate and uniformity
- Vacuum level requirements
- Substrate fixture requirements
- Facility location and available utilities
- Installation or training requirements
- Expected purchase timeline
Important Notes
- All configurations and specifications are subject to final inspection and formal quotation.
- Actual installed accessories, vacuum configuration, deposition sources, and controllers must be confirmed before quotation.
- AS-IS systems are sold in current condition without refurbishment unless otherwise specified.
- Functional test scope and refurbishment scope must be defined in final quotation before purchase order.
- All OEM names and trademarks belong to their respective owners.
- Website information is for reference only and is not final purchase specification.