Description

Refurbished Kurt J. Lesker Thermal Evaporator Thin Film Deposition System

SemiStar Corp. offers a refurbished Kurt J. Lesker Thermal Evaporator Thin Film Deposition System for semiconductor, university, research institute, optical coating, and advanced materials thin film deposition applications.

This system was operational at a Silicon Valley semiconductor fab in June 2018 before being moved to storage. The system is offered in refurbished condition with warranty and installation support if applicable.

The system includes thermal evaporation capability, Inficon deposition controllers, cryogenic vacuum pumping configuration, spare bell jar, and spare parts cabinet package.

Photos shown are for reference only. Actual configuration, installed accessories, options, and condition may vary. Final specifications are subject to formal quotation.

Availability

• Kurt J. Lesker thermal evaporator system
• Thin film vacuum deposition system
• Previously operational at Silicon Valley fab in June 2018
• Refurbished condition
• Warranty available under formal quotation terms
• Installation and startup support available if applicable
• Subject to prior sale

Current Configuration

• Kurt J. Lesker thermal evaporator system
• Currently configured with one bell jar deposition chamber
• Second / spare bell jar included
• Optional dual jar configuration capability
• Thermal evaporation sources
• Inficon IC6000 deposition controller
• Inficon XTC/2 deposition controller
• Pfeiffer Adixen ACP 15 dry vacuum pump
• Helix CTI Cryogenics cryocompressor
• CTI Cryogenics 8011 controller
• Granville Phillips GP307 vacuum gauge controller
• ASUS tower PC
• Seville Classics Ultra HD parts storage cabinet
• Spare parts cabinet contents included

System Description

This Kurt J. Lesker thermal evaporation system is configured for thin film vacuum deposition applications including semiconductor material research, optical coating, metal evaporation, and advanced materials development.

The system currently operates with a single bell jar chamber configuration. A second spare bell jar is included and may support optional dual jar configuration depending on customer requirements and final system setup.

The system utilizes thermal evaporation sources together with Inficon deposition monitoring and cryogenic high-vacuum pumping capability for controlled thin film deposition processing.

The included spare bell jar and spare parts cabinet may help support continued operation and long-term maintenance requirements for research and production-support environments.

Vacuum System Configuration

• Pfeiffer Adixen ACP 15 dry vacuum pump
• Helix CTI Cryogenics cryocompressor
• CTI Cryogenics 8011 controller
• Granville Phillips GP307 vacuum gauge controller
• High vacuum thin film deposition capability
• Bell jar vacuum chamber configuration
• Second / spare bell jar included
• Optional dual jar configuration capability

Deposition Control System

• Inficon IC6000 deposition controller
• Inficon XTC/2 deposition controller
• Thin film rate and thickness monitoring capability
• Thermal evaporation deposition configuration
• ASUS tower PC included

Typical Applications

• Thermal evaporation thin film deposition
• Metal evaporation
• Optical coating research
• Semiconductor material research
• University and institute R&D applications
• Advanced materials development
• Laboratory vacuum coating applications
• Research and pilot-scale thin film processing

Reference Specifications

Refurbishment Capability

• System inspection and condition report
• Vacuum chamber cleaning
• Vacuum leak check
• Thermal source inspection
• Deposition controller verification
• Cryogenic pump system inspection
• Vacuum gauge controller verification
• Electrical and interlock inspection
• Functional test before shipment
• Installation and startup support if applicable

Facility Requirements

• Customer is responsible for facility preparation
• Electrical power required
• Cooling water may be required depending on final configuration
• Vacuum pump exhaust connection required
• Compressed air may be required depending on valve configuration
• Rigging, utilities, exhaust, and local code compliance are customer responsibility unless otherwise specified

RFQ Information Requested

• Substrate size and material
• Deposition materials
• Film thickness requirements
• Required deposition rate and uniformity
• Vacuum level requirements
• Facility location and utilities
• Installation and training requirements
• Expected purchase timeline

Important Notes

• All configurations and specifications are subject to final inspection and formal quotation.
• Actual installed accessories, vacuum configuration, deposition sources, and controllers must be confirmed before quotation.
• Refurbished systems may include warranty and installation support under formal quotation terms.
• All OEM names and trademarks belong to their respective owners.
• Website information is for reference only and is not final purchase specification.

Contact SemiStar

SS380-MSP-125

1 2STM-1B Temescal Metallurgical Throttle Valve 2 4″-ST-2B Airco Temescal Vacuum Gate Valve, Quick Acting, Special 3 Airco / Temescal Model: 8008 Wired Controller. 4 Airco 1/2″ 1010 Brass Bellows Sealed Angle Valve 1/2″ FNPT Temescal 1010 Series 5 Airco 7/8″ 1110 Brass Bellows Sealed Angle Valve Temescal 1110 Series 6 Airco Ferrotec Temescal Four 4 Pocket Electron Beam SuperSource E-Beam Gun 7 Airco Ferrotec Temescal Four Pocket Electron Beam Source STIH270-1 E-Beam Gun 8 Airco High Vacuum Valve 1 1/2 Inch 120 VAC Fig. 2030 UHV Skinner Temescal 9 Airco Temescal 0101-8261-0 Electron Beam Power Supply CV -14 (Models A/B) Manual 10 Airco Temescal 1/2″ FNPT Brass Vacuum Pump Bellows Sealed Angle Valve 1000 Serie 11 Airco Temescal 2 Inch 5010 Aluminum Valve 12 Airco Temescal 2 Inch 5010 Aluminum Valve H-82 13 Airco Temescal 2130 1.5 inch Pneumatic Inline valve control controller 120V NICE 14 AIRCO TEMESCAL 2F4013D 2F4023 PCB BOARD 15 AIRCO Temescal 3″ 5130P ASA Vacuum Gate Valve 16 Airco Temescal 3″ Fig. 5010 Good 17 Airco Temescal 3″ Fig. 5010 Hand Operated 18 Airco Temescal 3” FIG 5030-2A Gate Valve Serial C-6 19 Airco Temescal 3” ST-2 High Vacuum Gate Valve 20 AIRCO TEMESCAL 307-2783 PCB BOARD 21 AIRCO TEMESCAL 4073983 4074003 CAPACITOR FOCUS BOARD 22 AIRCO TEMESCAL 4073983 4074003 CAPACITOR FOCUS BOARD 23 Airco Temescal 407-3983 Capacitor Focus Board Assembly Plug-In Module 407-3993 24 Airco Temescal 5/8″ Stainless Steel Vacuum Angle Valve FREE SHIPPING 25 Airco Temescal 5130 4″ Gate Valve Varian VSEA 5860001 26 Airco Temescal 6″ Fig. 5530 Vacuum Gate Valve, 8 Bolt Holes, w/ Micro Switch 27 Airco Temescal 702-4453 1″ Baseplate Three-pass Gas/Liquid Feedthrough 28 AIRCO TEMESCAL 8008 HAND HELD CONTROLLER 29 Airco Temescal AGC-2000 Laboratory Auxiliary Gauge Control 2U 30 Airco Temescal Auto Sequence Control 31 AIRCO TEMESCAL AUTO SEQUENCE CONTROLLER 32 Airco Temescal BJD-1800 Thermal Electro Beam Evaporator Molecular Coating 33 Airco Temescal BR-IF Bellows-Sealed Rotary Feedthrough 34 Airco Temescal CV-14 E-Beam Electron Beam Power Supply CV14 35 Airco Temescal CV-14 Electron Gun Control D.C. AMPERES 36 Airco Temescal CV-14 High Voltage Control D.C. AMPERES 37 AIRCO TEMESCAL CV8 POWER SUPPLY 38 Airco Temescal CV-8-110 Electron Beam Power Supply 39 Airco Temescal CV-8A-110 Industrial EB Power Supply Unit 5U Rackmount 40 AIRCO Temescal Edwards Turret Source Selector 41 AIRCO TEMESCAL Film Deposition Controller FDC-8000 42 AIRCO TEMESCAL Film Deposition Controller FDC-8000 43 AIRCO TEMESCAL HRS 2550 SPUTTERING SYSTEM 44 Airco Temescal Metallurgic Manual Valve Gate 9″ OD 5.25″ ID – 4″ 45 Airco Temescal Metallurgic Manual Valve Gate 9″ OD 5.25″ ID – 4″ 46 Airco Temescal model 8008 hand held controller 47 Airco Temescal Model CV-8 Power Supply 48 AIRCO Temescal Motor Speed Control MC4 49 Airco Temescal Power Supply Station CV8-2587 – Missing Tube As Is CV-8 50 Airco Temescal Right Angle Valve Regulator 51 AIRCO TEMESCAL SC-8009 0506-7160-0 CRYSTAL SENSOR 52 AIRCO TEMESCAL SC-8009 0506-7160-0 CRYSTAL SENSOR 53 Airco Temescal Simba T gun control board 54 Airco Temescal SSC-150 Turbomolecular Vacuum Pump Frequ 55 Airco Temescal VACUUM Technology. MOD MAIN. ASSY 0504-2330-0 56 AIRCO TEMESCAL VACUUM WATERLINE FEEDTHROUGH 1 INCH FOR HIGH VAC EVAPORATOR 57 AIRCO TEMESCAL VERSA VAC 2 VERSAVAC 2 THERMOCOUPLE IONIZATION GAUGE 58 AIRCO TEMESCAL VERSAVAC 2. 59 AIRCO TEMESCAL VERSAVAC 5 60 AIRCO TEMESCAL VERSAVAC 511-0323B 511-0343 RELAY OUTPUT MODULE 61 Airco Temescal XY Sweep BOC Coating Technology Programmable Sweep 0040-1054-2 62 AIRCO Temescal XYS-8-1A Sweep Control 63 AIRCO Temescal XYS-8-1A Sweep Control 64 AIRCO VERSAVAC TEMESCAL 511-0313 ELECTROMETER PC BOARD 65 AS IS Airco CL-2A 2KW AC/DC Discharge Power Supply 66 BOC Coating Technology 9999-8092-0 Temescal Spare Replacement Contact 67 BOC Edwards Temescal 0620-9120-0 Cable Assy SS64 Sweep Coil Dr. 68 BOC Edwards Temescal SuperSweep64™ Digital E-Beam Sweeper Rack Mounting, USA 69 BOC Edwards Temescal SuperSweep64™ Digital E-Beam Sweeper Rack Mounting, USA 70 BOC Edwards Temescal SuperSweep64™ Digital E-Beam Sweeper Rack Mounting, USA 71 BOC Edwards Temescal SuperSweep64™ Digital E-Beam Sweeper Rack Mounting, USA 72 BOC TEMESCAL 6042 2508 0 Din Rail Mount Adapter 73 BOC Temescal TRC-3460 Electron Beam Source Pocket Selector Turret Indexer 74 BOC Temescal TRC-3460 Electron Beam Source Pocket Selector Turret Indexer 75 BUTTERFLY VALVE, ALUMINUM, AIRCO TEMESCAL 2″ ST-1, MANUAL TURN 76 CHA / Temescal Evaporator Shielding Schematics Manual 77 Edwards Temescal 0040-1054-2 EB Scanner 1 Phase Programmable XY Sweep Scanner 78 Edwards Temescal 0040-1054-2 EB Scanner 1 Phase Programmable XY Sweep Scanner 79 Edwards/Temescal VES-2550 E-Beam Evaporator 3-Phase 208V CV-6SLX (6024-7110-0) 80 Ferrotec -Temescal Electron Beam Source, 4 pocket. E-Beam 270-3CKB 81 Gun Remote PCB 0040-5433-0 for a Temescal SIMBA2, Never Installed 82 High Vacuum Valve Airco Temescal 1130 5/8″ OD Brass Solder 120Vac 150 PSI Air 83 High Vacuum Valve Temescal 2030 5/8″ OD Tube Connections 120Vac 150 PSI Air 84 Inficon Airco Temescal 15528 Spectrometer Tube 2130-CT 85 MBE vapor source UHV vacuum deposition conflat temescal mocvd mdc varian 86 PELECTRON BEAM EVAPARATOR OWER CONTROL BY AIRCO TEMESCAL MODEL SCR-4 0505-0210 87 Skinner – Temescal Model 2030 24 VDC 1&1/2 Inch Vacuum Valve 88 Skinner-Honeywell-Temescal Five Eights Inch Port SS Vaccum Valve Model 2030 89 Skinner-Honeywell-Temescal Five-Eights Inch Model 2030 SS Valve PN 0024-5271-2 90 Skinner-Temescal In-Line 1/2 Inch Pipe Threaded Model 1230 91 TEMESCAL “SuperSource” 6 POCKET E-BEAM SOURCE (GUN) 92 Temescal (Unbranded) 2″ Vacuum Gate Valve 93 TEMESCAL 0024-0011-0 VACUUM VALVE MODEL: 1/2″ 1010, SERIES 1000 94 TEMESCAL 0024-0011-0 VACUUM VALVE MODEL: 1/2″ 1010, SERIES 1000 95 Temescal 0040-3563-0 Position Control PCB PLC Card Board 96 Temescal 0101-8261-3 Electron Beam Power Supply CV-14 Models A & B Manual 97 Temescal 0101-8572-2 Model FCS-3200 Fast-Cycle Load-Lock Sputter System Manual 98 Temescal 0101-8572-2 Model FCS-3200 FastCycle Load-Lock Sputtering System Manual 99 Temescal 0101-8575-7 FC-1800#321 Documentation Service Manual 100 Temescal 0101-8741-0 HA-2 1KW Substrate Heating Assembly Instruction Manual 101 Temescal 0101-9009-0 FCE-2500/2700 System Documentation Service Manual 102 Temescal 0222-9232-0 Wheel Bushing 103 Temescal 0224-2611-0 2″ 5130 Vacuum Gate Valve 104 Temescal 0317-6871-0 Filament Replacement 7 1/2 Turns 105 Temescal 040-3543A Position Control PCB PLC Card Board 106 TEMESCAL 0715-8173-2 INSERT 107 Temescal 101-0481 BCD-2430 Ion Plater With Rod Fed Source Instruction Manual 108 Temescal 2″ Vacuum Gate Valve 109 TEMESCAL 200 LASER CONTROLLER POWER SUPPLY 110 Temescal 2130 SS 5/8″ Vacuum Valve w/120 VAC Skinner Solenoid Air Valve 111 Temescal 3CK Crucible 112 Temescal 4 Pocket electron beam gun and Components 113 Temescal 7cc Premium Poco Graphite Crucible/Liner 9998-9004-0 for Ebeam Gun 114 Temescal 9-20-97 FCE-2500/2700 System Documentation Operations Manual 115 Temescal A/W 610-7994 FAB 610-8004 ASSY 610-8014 Auxiliary Control Panel Display 116 Temescal Airco 5016028-01 C1 E-Beam Circuit Board 117 Temescal Airco 5016028-01 E2P1 E-Beam Circuit Board 118 Temescal Airco 730529 Lens Control E-Beam Circuit Board 119 Temescal Airco 85121-2-C 9/15 Dual Mag and Zoom E-Beam Circuit Board 120 Temescal Airco 851285-6-8/11 PIC Processor Chan 1 E-Beam Circuit Board 121 Temescal Airco 851288-2-A-14/13 Dividers E-Beam Circuit Board 122 Temescal Airco 851297-2-A-9/9 Sig Sector and Gama E-Beam Circuit Board 123 Temescal Airco 851311/2/2/2 E-Beam Circuit Board 124 Temescal Airco 851320-2-A-2/5 E-Beam Circuit Board 125 Temescal Airco 851321/B/2/3 E-Beam Circuit Board 126 Temescal Airco 851582/2/B/4/3 E-Beam Circuit Board 127 Temescal Airco 851589/2/B/3/3 Gaugees and Sensor E-Beam Circuit Board 128 Temescal Airco 851589/2/B/4/9 Gauges and Sensor E-Beam Circuit Board 129 Temescal Airco 851691/2/C/2/4 Console E-Beam Circuit Board 130 Temescal Airco 85189-2 B 13 Control Logic E-Beam Circuit Board 131 Temescal Airco 851940/2/B/2/3 DVM Interface E-Beam Circuit Board 132 Temescal Airco 851976-2B-1/5 E-Beam Circuit Board 133 Temescal Airco ASC-3200S Control Panel 134 Temescal Airco ASC-3200S Control Panel 135 Temescal Airco ASC-3200S Process Status Control Panel 136 Temescal Airco ASC-3200S Status Control Panel 137 Temescal Airco Motorola M68MM01 Micromodule 1 Computer Module 138 Temescal Airco RSC-1000 Rotation Sequence Controller 139 Temescal Airco RSC-1000 Rotation Sequence Controller 140 Temescal Airco RSC-1000 Rotation Sequence Controller 141 Temescal Airco SC-3200 Sputtering Controller 142 Temescal Airco SC-3200 Sputtering Controller 143 Temescal Airco single pocket electron beam gun For Vacuum Chamber Coating Optics 144 TEMESCAL AUTO SEQUENCE CONTROL 145 Temescal BJD 1800 Thermal Evaporator – Co-Deposition 146 Temescal BJD 1800 Vacuum System 147 Temescal BJD-1800 BOX COATER with 8 Thermal Evaporation Sources 148 Temescal BJD-1800 E Beam Evaporator Instruction Manual 149 TEMESCAL BJD-1800 REBUILT 150 Temescal BOC Edward 0620-9092-0 Sweep I/F SS64 I/O Connector Cable Assembly 151 Temescal BOC Edwards SGC-G1J2 E Gun Control I/O Vacuum Cable 0620-9730-1 152 Temescal BOC Edwards SGC-HV J2 Input-Output HV Control Cable 0620-1090-0A 153 Temescal BOC SuperSweep 64 154 Temescal Cable Assembly HV 4′ FPS-SRC, SATIS P/N 0620-8674-0 155 Temescal Cables EBC-HVPIOTS 0620-6824-0 156 Temescal CV-14 Constant Voltage Power Supply Manual 157 Temescal CV15 Power Supply With Computer Interface Manual 158 TEMESCAL CV-6SL / CV6SL (REPAIR EVALUATION ONLY) 159 Temescal CV6SL 13945 3 Phase, 20 A, 400V, 6000W Electron Beam Power Supply 160 Temescal Ebeam HV & Gun Controller 161 Temescal Electron Beam Power Supply and Gun Controller 162 Temescal Electron Gun model SFIT-270-2 40cc single pocket 163 Temescal FC-1800 Component Manuals Manual 164 Temescal FC-1800 Evaportation System Instruction Manual 165 Temescal FCE-1800 Manual Electron Beam Evaporator System Manual 166 Temescal FCE-2700 Electrical Component Manuals Manual 167 Temescal FCE-2700 Volume III Spares, Drawings With Parts Lists Manual 168 Temescal FCS-3200 Electrical Prints & Modifications Manual 169 Temescal ferro tec filament power supply for electron beam source uhv vacuum 170 Temescal Fluidmove Software User Manual 171 TEMESCAL GATE VALVE 3″ 5130 V-5 172 Temescal Handheld Controller for Programmable Sweep Controller 0040-1054-2 173 Temescal HV and Gun Control for Simba II Power Supply 174 Temescal IG-1300 Thermocouple Ion Gauge – AS IS 175 Temescal Ionization Gauge Tube 924B 176 Temescal Magnet Rotary Feedthrough 9999-0014-1 B81427 177 Temescal Model BJE2400 Automatic R-F Sputter ETCH System Manual 178 Temescal Model FDC 8000-1 FDC 8000-2 Film Deposition Controller Manual 179 Temescal Model: 2030. 1-1/2″ Valve. 180 Temescal Power Supply 15VDC 5VDC 24VDC 2A 7A 1A 181 Temescal SFIH270-2 Super Source Bar Magnet 182 Temescal Simba 0611-7344 Gun Interface Electron Beam Sources Power Supply – USA 183 Temescal Simba 2 Electron Beam Power Supply 0611-7330, Three Phase, 15 kW – USA 184 Temescal Simba 2 Electron Beam Power Supply, input: 480V 185 Temescal SIMBA 2 Gun Interface Power Supply 0040-6720-3 186 Temescal Simba Gun Interface 0611-7344-2 Electron Beam Power Supply, Made in USA 187 Temescal Simba Gun Interface STMBA 2 0040-6720-1 188 Temescal Simba II Gun Control Driver board 189 Temescal Simba Sweep main control board 190 Temescal Sloan Telemark Style Electron-Beam Feedthrough 191 Temescal STIH-270-2CK/2CKB Super Source 2 Electron Beam Turret Source Manual 192 Temescal Supersweep64 193 Temescal tem-e-beam electron beam deposition controller uhv vacuum ferrotec 194 Temescal TRC-3460 Electron Beam Source Indexer w HV + Gun Control in Rack Mount 195 Temescal VES 2550 Electron Beam Evaporator 196 Temescal VES 2550 Rebuilt Vacuum System 197 Temescal VWS1090 Sweep / BOC Coating / Ebeam Sweep control 198 Temescal/Airco FC-1800 E-Beam Thin Film Evaporator w/1 Gun 199 Turret source selector temescal Edward, 200 Vacuum valve 4 in ID Temescal Metallurgical Corp