Description
Please contact us for the availability of the LAM Research Lam AutoEtch 490 used Semiconductor Equipment.
| Manufacturer | LAM Research Co |
| Model | 490 AUTO ETCH |
| Wafer Size Range |  |
| Minimum | 75 mm |
| Maximum | 200 mm |
| Set Size | 150 mm |
| Process | Nitride Etch |
| Controller Type | Microprocessor Controller Type |
| Cassette to Cassette | YES |
The items are subject to prior sale without notice. These items are only for end users.
SS5732
