Description
Tepla 600-AL (autoload) plasma asher
Location: CA, U.S.A.
Condition: We sell this item at complete, working, functional test with OEM specifications.
These are subject to prior sale. These are only for end user. Appreciate your time.
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
TEPLA 600 PLASMA ASHER consisting of:
– Model: 600 SemiAuto
– Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
– Chamber Size: 245mm diameter, 380mm depth
– Chamber Material: ceramic
– ENI RF Generator: 0-600 Watt, 13.56 MHz
– Semi-Automatic RF Plasma System
– Can process up to 200mm wafers
– Gases: 4 channels controlled by 4 MFCs
– Leybold D65B Vacuum Pump
– Dimensions: 740mm x 624mm x 701mm + connections
– Electrical: 230V, 50/60Hz, 15A, 2kW
Applications:
– Photoresist stripping
– Surface cleaning as part of photolithography after wet developing
– Stripping of photoresist layers after etching
– Removal of organic passivating layers and masks
– Etching of glass and ceramic
– Etching of SiO2, Si3N4, Si
– Removal of polyimide layers.
– Surface cleaning after storage
– Surface cleaning after processes using oil pump or diffusion pump vacuum
The photo is only for your reference.
SS7270-1-2-1-1 and SS7270W
