Main Maker

Tepla 300AL

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Description

Tepla 300AL Microwave plasma batch system Autoload PC

Location: CA, U.S.A.

Condition: We sell this item at complete, working, functional test with OEM specifications.

These are  subject to prior sale. These are only for end user. Appreciate your time.

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

  • Microwave plasma batch system for resist stripping and wafer cleaning
  • 245mm (9.6″) diameter 380mm (15″) ceramic process chamber with 200mm wafer capability
  • PC controller
  • Batch size: 25 wafers per load
  • Microwave frequency 2.45GHz
  • maximum power 1000 watts
  • 4 process gas channels with MFC’s calibrated for N2 1000SCCM
  • Capacitance manometer MKS Baratron
  • Optical end point detector
  • 230v, 50/60hz, single phase, 16 amps, 2KW
  • CE Certified
  • Mactronix LTP-650E Automatic cassette loader
  • MKS throttle valve
  • Software: manual and automatic operation, graphical display
  • Temperature control: IR thermometer

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SS7270-1-2-1-1 and SS7270W

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers