Description
Please contact us for the Tegal Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.
| OEM PART #: | MATERIAL: | DESCRIPTION: | System |
| ES1D10-309946-12 | Ring Focus Silicon | ||
| 1810-221471-24 | Silicon | Showerhead | |
| 3D05-100010-11 | Quartz | Shower Head Electrode Cover | |
| 1D10-101551-11 | Baffle Plate 8″ | Etch | |
| 1D10-101475-11 | Baffle Plate 8″ | Etch | |
| 1D10-202988-11 | DRM2 Cover Bellows 8″ | Etch | |
| 1D10-202204-12 | Electrode Upper Vespel Insert W/Monitor | ||
| 1D10-100670-13 | Electrode Upper | ||
| 1D10-201429-15 | Electrode Upper | ||
| 1D10-100854-15 | DRM2 Baffle Plate | ||
| 1D10-303124-21 | DRM2 Shield Depo | ||
| 1D10-303124-21-CT | Shield Depo | ||
| 1D10-303124-21-CT | Shield Depo | ||
| 1810-221584-12 | Upper Cooling Plate | ||
| 1810-221471-24 | Silicon | Electrode, Si 100% | |
| 1D10-302209-14 | Silicon | Focus Ring Si | |
| 1D05-300161-11 | Quartz | Support Shield Depo Q-S1 | |
| 1D05-200020-11 | Quartz | Shield Depo QU-A-3 | |
| 1D05-200033-11 | Quartz | Support Shield Depo Q-S5 | |
| 1D05-400022-14 | Quartz | Window Shield Depo | |
| 1D05-300162-70H CT | Quartz | Focus Ring Quartz | |
| 1D05-300162-11 | Quartz | Focus Ring Quartz | |
| 1D10-407114-11 | Kapton | Kapton Sheet Window | |
| 1D10-406500-11 | Pin Window Peelc B-1 | ||
| 1D10-406499-11 | Sapphire | Sapphire Window | |
| 1D10-309697-11 | Quartz | Window DEP P-1 (Hole) | |
| 1D05-400022-14 | Quartz | Window Shield Depo (DRM 2) | DRM 2 |
| 1D10-404285-11 | Pin Adjust | ||
| 1D10-401935-12 | Screw Blind A (DRM 2) | DRM 2 | |
| 1D10-401106-12 | Plug Thin (DRM 2) | DRM 2 | |
| 1D10-402088-11 | Plug SR (DRM 2) | DRM 2 | |
| 1D10-403927-11 | Plug Thick (DRM 2) | DRM 2 | |
| 1D10-302057-11 | JIG Gap | ||
| 1D10-405256-22 | Screw for Upper Quartz Flat (88DD) | 88 DD | |
| 1D10-406675-11 | Vespel | Vespel plug for Focus Ring (88DD) | 88 DD |
| 1D10-406875-11 | Pin Support Q-S1 (88DD) | 88 DD | |
| 1D10-405257-11 | Kapton | Washer Kapton A (88DD) | 88 DD |
| 3D10-201235-13 | Plate, Cooling C912-240-0.2 (HT) | ||
| 3D10-100844-11 | Plate, Shiled (TE GND FLAT) | ||
| 3D10-101152-13 | Plate, Exhaust Y-AL | ||
| 3D10-101190-11 | Ring STM Shield Y-AL | ||
| 3D10-100845-11 | Shuttle BTM Type Y-AL | ||
| 3D10-302734-12 | Shield Depo (TE-GLEX45-FLAT) | ||
| 1D10-201588-12 | Upper Electrode W/Monitor | ||
| 1D10-202177-12 | Upper Electrode Vespel Insert | ||
| 1D10-303124-21 | DRM2 Depo Shield | ||
| 1D10-406499-11 | Sapphire | Sapphire Window | |
| 1810-329157-11M | Single Crystal Si | Modify Inner Focus Ring (SCCM) | TEL SCCM |
| ES1D10-310020-11 | Single Crystal Si | Si Focus Ring | 85DD Tel Unity |
| HDL99-040302R2 | Ceramic | Focus Ring 2 piece Ceramic Inner | 85TPATC TEL Unity |
| 1105-200159 | Si | Si Collar Ring | |
| 1D10-100854-15 | DRM2 BAFFLE PLATE | Unity 85 | |
| 1D10-101398-11 | BAFFLE PLATE | ||
| 1D10-101475-11. | BAFFLE PLATE | Unity 85 | |
| 1D10-101551-11 | BAFFLE PLATE | Unity 85 | |
| 1D10-102848-13 | BAFFLE PLATE Y203 | ||
| 1D10-200734-14 | COVER BELLOW | Unity 85 | |
| 1D10-202177-12 | UPPER ELECTRODE, VESPEL INSERT | Unity 85 | |
| 1D10-201429-15 | UPPER ELECTRODE | Unity 85 | |
| 1D10-201588-12 | UPPER ELECTRODE W/MONITOR | Unity 85 | |
| 1D10-202204-12 | UPPER ELECTRODE, VESPEL INSERT, W/MONITOR | Unity 85 | |
| 1D10-202988-11 | DRM2 COVER BELLOW | Unity 85 | |
| 1D10-204418-12 | BELLOW COVER Y203 | ||
| 1D10-204419-12 | BELLOW COVER Y203 | ||
| 1D10-204338-13 | UPPER ELECTRODE Y203 | ||
| 1D10-303124-21 | DRM2 DEPO SHIELD | Unity 85 | |
| 1D10-309697-11 | DEPO WINDOW | ||
| 1D10-315183-15 | DEPO SHIELD Y203 | ||
| 1D10-406499-11 | Window Sapphire | ||
| 3M87-029068-16 | Showerhead (High Temp) 300mm | CVD/TEL-Trias | |
| 3M10-150159-12 | Showerhead (Low Temp) 300mm | CVD/TEL-Trias | |
| 3M10-352195-11 | Block (Low Temp) 300mm | CVD/TEL-Trias | |
| 3M10-101634-11 | Low Plate 300mm | CVD/TEL-Trias | |
| 3M10-101633-11 | Middle Plate 300mm | CVD/TEL-Trias | |
| 3M10-313563-11 | Diffuser Tube 300mm | CVD/TEL-Trias | |
| 3M10-410298-11 | Diffuser Tube 300mm | CVD/TEL-Trias | |
| 3D10-404449-11 | Gaskets Type TEL Shin 12″ | Etch TEL-SCCM TELIUS Shin | |
| 2L10-354181-11 | Gaskets Type TEL 4W/mk | Etch TEL-SCCM TELIUS Shin | |
| 2L10-354527-11 | Gaskets Type TEL 2W/mk | Etch TEL-SCCM TELIUS Shin | |
| 3D10-100280-11 | TE-12″ Silicon Cathode (H836) | Etch TEL-SCCM TELIUS Shin | |
| 3D10-302020-11 | Vigus- 12″ Silicon Cathode (H912) | Etch TEL-SCCM TELIUS Shin | |
| 3D10-250316-11 | Shin-12″ Silicon Cathode Inner (H1283) | Etch TEL-SCCM TELIUS Shin | |
| 3D10-201579-11 | Shin-Electrode Upper T10-75-C708 | Etch TEL-SCCM TELIUS Shin | |
| 3D10-201761-11 | Shin-Electrode Upper D38 (DM-SE) | Etch TEL-SCCM TELIUS Shin | |
| 3D10-201784-11 | Shin-Electrode Upper D38 (DM-SE) | Etch TEL-SCCM TELIUS Shin | |
| 3D10-202364-12 | Shin-Si CEL Inner (TE-T10-P-Laby) | Etch TEL-SCCM TELIUS Shin | |
| 3D10-202175-11 | Shin-CEL Inner (TE-T10-P) | Etch TEL-SCCM TELIUS Shin | |
| 3D10-201089-13 | Telius – 12″ Focus Ring | Etch TEL-SCCM TELIUS Shin | |
| 3D10-200499-11 | Telius – 12″ Focus Ring | Etch TEL-SCCM TELIUS Shin | |
| 3D10-201348-11 | Telius – 12″ Focus Ring | Etch TEL-SCCM TELIUS Shin | |
| 3D10-201448-11 | Telius – 12″ Focus Ring | Etch TEL-SCCM TELIUS Shin | |
| 3D10-201448-12 | Telius – 12″ Focus Ring | Etch TEL-SCCM TELIUS Shin | |
| 3D10-201448-13 | Telius – 12″ Focus Ring | Etch TEL-SCCM TELIUS Shin | |
| 3D10-200585-13 | Telius – 12″ Ring Shield Si | Etch TEL-SCCM TELIUS Shin | |
| 3D10-101195-11 | Depo Shield | ||
| 3805-320070-B1 | Quartz Injector Straight | ||
| 3805-320072-B1 | Quartz Plug | ||
| 3805-420016-B1 | Quartz Guide |
