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2016

Mattson Spare Parts

Please contact us for the Mattson Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

Category: Parts

Description

Description

Please contact us for the Mattson Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

SS5302

OEM PART #:	DESCRIPTION:
544-00024-00	Quartz Tube
182-64000-00	Cable Assy #301
456-09610-02	Quartz Tube O-Ring (8/Pack) MA
913-10031-00	O-Ring 1.987 ID x .103 (OBE)
913-10053-00	Shuttle O-Ring (PKT-6)
913-10031-00	O-Ring 1.987 ID x .103 CS (PKT-8)
58700001	Quartz Process Tube
57400009	Liner Plate Bottom
57600004	GDP Rectangle
57400010	Liner Plate Bottom For Ripple
58700001	Quartz Insulating Tube
58500023	Quartz Pin
58700002	Process Chamber 8″
58900068	Wafer Tray 6″
58700015	Quartz Tube 8″ For Riple
544-00024-00	Quartz Plasma Tube
57400002	Liner Plate 8″ Top -124
58800003	Tray Holder Quartz Elbow
57600002	GDP Trapezoid
47800002	Edge Gard Ring 6″
58500047	Quartz Pin
58700015	Quartz Tube 8″ For Riple
58500012	Quartz Pins 13mm for Cooling Station
58500029	Quartz Fulcrum Top Part
58600071	Ring Basement
58600007	Quartz Fixing Part for Liner Plate
57100012	Quartz Door Apeture 6″
58500047	Quartz Pin
263-13415-00	Showerhead CVD
1001464	Quartz Tube Mattson

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