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Tegal parts

Category: Resell Products Tags: Tegal, Tegal Parts

Description

Description

The following Tegal parts are only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

1	37-221-001	Tegal 1903E	Upper Electrode
2	37-221-003	Tegal 1903E	Upper Electrode
3	40-788-616	Tegal 901E	Centering ESC 6″ Bnded Genhre
4	39-680-003	TSI-TG80003	Electrode Conehead
5	40-140-001		RING INSUL CER
6	40-140-003		RING INSUL CER 99.5
7	40-395-001		RING, FLAT 6″ CERAMIC
8	40-395-001		RING 6″ CASTELLATED W/ FLAT CUTAWAY
9	40-395-002		Ring, Ceramic, 125C, Castellated
10	40-395-003		RING 4″ CASTELLATED W/ FLAT CUTAWAY
11	40-575-003-C		Ring, Ceramic Nest, Flat Ring
12	40-576-003-C		Ring Ceramic Focus, Castellated
13	39-344-002	Tegal 901	Shower Head
14	40-395-001
15	40-788-616
16	40-869-002
17	80-202-357	O-Ring	O-Ring
18	37-222-002		Cooling Plate
19	39-733-004		901e Lower Electrode
20	39-735-003		903e Lower Electrode
21	39-735-004		903e Lower Electrode
22	39-741-009		903e Lower Electrode
23	39-741-010		903e Lower Electrode
24	39-741-026		903e Lower Electrode
25	39-927-007		903e Lower Electrode
26	39-927-008		903e Lower Electrode
27	40-260-001		Window Sapphire
28	40-826-001	Quartz	Shield Ion Stripper Quartz
29	19684-2		Washer Spacer .56 OD x .19 ID
30	37-221-002	Tegal 1903E	Upper Electrode
31	40-140-003	Ceramic	Ring Insulator Ceramic
32	40-516-005		Ring Macor RAD Comp 4′ T/16XX
33	39-735-002		903e Lower Electrode
34	39-741-002		Lower Electrode Anodized
35	39-927-022		903e Lower Electrode 6″-Flat-Ano
36	40-822-002	Tegal	Focus Ring Quartz Tegal

ID-SS5302-2ND

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Recommended Hot Equipment

Metrology | Tester | Wafer Carriers
Main Refurbished Equipment

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