Description
Please contact us for the availability of the Tegal 803 used semiconductor equipment.
Inline Automatic Plasma Etcher. The Plasma Inline 803 is a fully automatic, microprocessor-based plasma chemistry etcher designed especially for the etching of silicon dioxide (Si02) thin film deposited on single crystal or polysilicon semiconductor wafers. It provides up to four process gases
The items are subject to prior sale without notice. These items are only for end users.
SS5626