Main Maker

Tegal 803

Description

Please contact us for the availability of the  Tegal 803 used semiconductor equipment.

Inline Automatic Plasma Etcher. The Plasma Inline 803 is a fully automatic, microprocessor-based plasma chemistry etcher designed especially for the etching of silicon dioxide (Si02) thin film deposited on single crystal or polysilicon semiconductor wafers. It provides up to four process gases

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