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MetroLine PVA Tepla M4L

Category: Resell Products Tags: Branson/IPC, Metroline, Plasma Asher, PVA Tepla, TePla

Description

Description

The MetroLine PVA Tepla M4L Branson M4L Plasma Cleaning & Etching System is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

Location: USA

Condition: Used

Quantity: 1 set available

Condition: Used. We can sell them at : (1) AS IS condition, (2) Complete, working, functional test condition.

Info from websites on the system for your reference only.

The PVA TePla M4L is an open-load plasma asher, useful for removing organic resists from substrates, surface plasma cleaning, or surface modification/roughening of select materials. Samples can be placed on either biased, or grounded electrodes, allowing for either more, or less, aggressive plasma treatments.

Manufacture Specifications

Can operate between 0-2000 mTorr, with 0-500W RF power at 13.56 MHz.
It can accommodate samples up to 200 mm in diameter.
2 shelves in chamber

THE M4L IS IDEAL FOR:

Plasma surface modification
Plasma cleaning of organic surfaces
Bond strength enhancement
Plasma etch applications
Plasma asher applications
Increased or decreased wettability
Any other plasma system application

Key Features:

Controller: Windows® O/S based touch screen interface offering fully automatic control.
Multi-step recipes, real time graphic display, multi-level password access, data logging, and real time SPC monitoring of all plasma parameters is provided.
Chamber: 9″ X 13″ X 20″ Aluminum, with high-conductance KF 40 port and isolation valve. Optional throttle valve available.
Electrode options include 3-shelf, 5-shelf, and cage electrodes.
RF Generator: 300 or 600 watt 13.56 MHz air cooled with automatic impedance matching network.
Display: Color 10.4 inch touch screen for control and monitoring of process parameters, automatic recipes, or manual plasma treatments.
Two user specified gases, with 500 sccm MFCs standard, Optional 3rd gas channel available.
Power Requirements: 120- 240 volts, 1ø, 50/60 Hz 30 amps maximum, changeable in the field.
CE Certified

ID-SS380EB

S

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