Description
Plasmatherm 770 ICP Ion Couple Plasma Etching System
- Plasmatherm 770 ICP Ion Couple Plasma Etching System
- Manual Load Lock, Ceramic Clamp style ICP system
- Leybold 600C turbo with Leybold NT20 controller, VAT Pen VAT PM5 Gage Valve controller Watlow Six Zone Chamber heat controller MKS 290 Ion Gauge Controller Backside He Cooling
- Advanced Energy RF5S 500W RF lower Electrode power supply with match work and tuner RFVII 1000W 13.56MHz upper Electrode power supply with match work and tuner
- Currently four Mass Flow Controllers
- Can offer System refurbished, operational or As is, where is.
- Can offer installation & training as well.
SS181761252693