Main Maker

Plasmatherm 770 ICP Ion Couple Plasma Etching System

Category:

Description

Plasmatherm 770 ICP Ion Couple Plasma Etching System

  • Plasmatherm 770 ICP Ion Couple Plasma Etching System
  • Manual Load Lock, Ceramic Clamp style ICP system
  • Leybold 600C turbo with Leybold NT20 controller, VAT Pen VAT PM5 Gage Valve controller Watlow Six Zone Chamber heat controller MKS 290 Ion Gauge Controller Backside He Cooling
  • Advanced Energy RF5S 500W RF lower Electrode power supply with match work and tuner RFVII 1000W 13.56MHz upper Electrode power supply with match work and tuner
  • Currently four Mass Flow Controllers
  • Can offer System refurbished, operational or As is, where is.
  • Can offer installation & training as well.

Please contact us for more information on the product:

Your Name*:

Your Email:

Your Message:

Captchac Codecaptcha

Submit:

SS181761252693

 

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers