Plasma Therm 790 Series PECVD Plasma Etch Chemical Vapor Deposition System
Model: 790 DEP MN Fr, Serial# PTI-78288
Including: Leybold TriVac, Neslab HX75 Chiller, Manuals. Pls contact us for more info if necessary. Appreciate your time!
Gases Used: SiH4, NH3, N2, N2O, CF4O2
It was from a Continuing Operations Wafer Processing Fab in Bay Area,CA USA on 12/10/2020. It was complete, working. System was purged of all contaminates, decommissioned, and moved to our facility in Morgan Hill,CA USA.
Complete, working, functional test is available at extra cost.