Description
Model: OXFORD Plasmalab 800 Plus PECVD
Category: PECVD
Original Equipment Manufacturer: Oxford
Condition:Refurbished
Price: Please contact us.
Valid Time: Subject to prior sale without notice
Lead Time: 8-12 weeks depending on PO time
Location: U.S.A.
Warranty: 7 months
- OXFORD Plasmalab 800 Plus PECVD
- Set up for SiOx, SiNx, SiOxNy Deposition
- Batch Process
- 450mm Platen with 300°C+ heater
- RF Power: 350W 13.56MHz and 300W 480KHz
- Windows PC , user friendly interface
- Gas pod with 6 lines including following MFCs:
N2 – 1000sccm
N2O – 100sccm
N2O – 2000sccm
NH3 – 100sccm
SiH4 – 2000sccm














